Laser postionization of neutral molecules sputtered using bismuth and argon cluster primary ions

2018 ◽  
Vol 13 (3) ◽  
pp. 03B412 ◽  
Author(s):  
Marcel Heeger ◽  
Bonnie J. Tyler ◽  
Martin Körsgen ◽  
Heinrich F. Arlinghaus
Keyword(s):  
Primary Ions

Ion yield improvement for static secondary ion mass spectrometry by use of polyatomic primary ions

2008 ◽  
Vol 22 (10) ◽  
pp. 1481-1496 ◽  
Author(s):  
Roel De Mondt ◽  
Luc Van Vaeck ◽  
Andreas Heile ◽  
Heinrich F. Arlinghaus ◽  
Nicolas Nieuwjaer ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Yield Improvement ◽  
Ion Mass Spectrometry ◽  
Primary Ions ◽  
Secondary Ion

scholarly journals Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

2016 ◽  
Vol 7 ◽  
pp. 1749-1760 ◽  
Author(s):  
Patrick Philipp ◽  
Lukasz Rzeznik ◽  
Tom Wirtz
Keyword(s):  
3D Imaging ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Lateral Resolution ◽  
Cluster Ions ◽  
Depth Information ◽  
Preferential Sputtering ◽  
Atomic Mixing ◽  
Primary Ions ◽  
Ion Species

The analysis of polymers by secondary ion mass spectrometry (SIMS) has been a topic of interest for many years. In recent years, the primary ion species evolved from heavy monatomic ions to cluster and massive cluster primary ions in order to preserve a maximum of organic information. The progress in less-damaging sputtering goes along with a loss in lateral resolution for 2D and 3D imaging. By contrast the development of a mass spectrometer as an add-on tool for the helium ion microscope (HIM), which uses finely focussed He+ or Ne+ beams, allows for the analysis of secondary ions and small secondary cluster ions with unprecedented lateral resolution. Irradiation induced damage and depth profiling capabilities obtained with these light rare gas species have been far less investigated than ion species used classically in SIMS. In this paper we simulated the sputtering of multi-layered polymer samples using the BCA (binary collision approximation) code SD_TRIM_SP to study preferential sputtering and atomic mixing in such samples up to a fluence of 1018 ions/cm2. Results show that helium primary ions are completely inappropriate for depth profiling applications with this kind of sample materials while results for neon are similar to argon. The latter is commonly used as primary ion species in SIMS. For the two heavier species, layers separated by 10 nm can be distinguished for impact energies of a few keV. These results are encouraging for 3D imaging applications where lateral and depth information are of importance.

Time-of-flight measurements of secondary organic ions produced by 1 keV to 16 keV primary ions

1982 ◽  
Vol 198 (1) ◽  
pp. 33-38 ◽  
Author(s):  
K.G. Standing ◽  
B.T. Chait ◽  
W. Ens ◽  
G. McIntosh ◽  
R. Beavis
Keyword(s):  
Time Of Flight ◽  
Organic Ions ◽  
Primary Ions ◽  
Flight Measurements

scholarly journals Characterization of the mass-dependent transmission efficiency of a CIMS

2016 ◽  
Vol 9 (4) ◽  
pp. 1449-1460 ◽  
Author(s):  
Martin Heinritzi ◽  
Mario Simon ◽  
Gerhard Steiner ◽  
Andrea C. Wagner ◽  
Andreas Kürten ◽  
...  
Keyword(s):  
Mass Spectrometer ◽  
Chemical Ionization ◽  
Transmission Efficiency ◽  
Ion Source ◽  
Mass Discrimination ◽  
Perfluorinated Acids ◽  
Relative Transmission ◽  
The Absolute ◽  
Primary Ions

Abstract. Knowledge about mass discrimination effects in a chemical ionization mass spectrometer (CIMS) is crucial for quantifying, e.g., the recently discovered extremely low volatile organic compounds (ELVOCs) and other compounds for which no calibration standard exists so far. Here, we present a simple way of estimating mass discrimination effects of a nitrate-based chemical ionization atmospheric pressure interface time-of-flight (CI-APi-TOF) mass spectrometer. Characterization of the mass discrimination is achieved by adding different perfluorinated acids to the mass spectrometer in amounts sufficient to deplete the primary ions significantly. The relative transmission efficiency can then be determined by comparing the decrease of signals from the primary ions and the increase of signals from the perfluorinated acids at higher masses. This method is in use already for PTR-MS; however, its application to a CI-APi-TOF brings additional difficulties, namely clustering and fragmentation of the measured compounds, which can be treated with statistical analysis of the measured data, leading to self-consistent results. We also compare this method to a transmission estimation obtained with a setup using an electrospray ion source, a high-resolution differential mobility analyzer and an electrometer, which estimates the transmission of the instrument without the CI source. Both methods give different transmission curves, indicating non-negligible mass discrimination effects of the CI source. The absolute transmission of the instrument without the CI source was estimated with the HR-DMA method to plateau between the m∕z range of 127 and 568 Th at around 1.5 %; however, for the CI source included, the depletion method showed a steady increase in relative transmission efficiency from the m∕z range of the primary ion (mainly at 62 Th) to around 550 Th by a factor of around 5. The main advantages of the depletion method are that the instrument is used in the same operation mode as during standard measurements and no knowledge of the absolute amount of the measured substance is necessary, which results in a simple setup.

Depth profiling of the C/Si interface

1993 ◽  
Vol 71 (11-12) ◽  
pp. 578-581
Author(s):  
D. M. Danailov ◽  
V. Miteva ◽  
U. Littmark
Keyword(s):  
Monte Carlo ◽  
Ion Beam ◽  
Depth Profiling ◽  
Computer Code ◽  
Carbon Films ◽  
Silicon Substrates ◽  
Thin Carbon ◽  
Beam Stability ◽  
Different Temperatures ◽  
Primary Ions

Auger profiles analysis is performed on thin carbon films deposited on silicon substrates (a-C:D/Si) using a 5 keV Xe+-ion beam. Stability of the interface is observed after annealing at different temperatures. The profiling is modeled by means of a Monte-Carlo dynamic computer code. A comparison is made of the mixing of the layers for profiling with different primary ions: the heavy Xe+ and the commonly-used Ar+.

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