Frequency dispersion and dielectric relaxation in postdeposition annealed high-κ erbium oxide metal–oxide–semiconductor capacitors

2018 ◽  
Vol 36 (1) ◽  
pp. 012201 ◽  
Author(s):  
Robin Khosla ◽  
Satinder K. Sharma
Keyword(s):  
Metal Oxide ◽  
Dielectric Relaxation ◽  
Frequency Dispersion ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Erbium Oxide

Temperature dependence of frequency dispersion in III–V metal-oxide-semiconductor C-V and the capture/emission process of border traps

2015 ◽  
Vol 107 (5) ◽  
pp. 053504 ◽  
Author(s):  
Abhitosh Vais ◽  
Han-Chung Lin ◽  
Chunmeng Dou ◽  
Koen Martens ◽  
Tsvetan Ivanov ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Temperature Dependence ◽  
Frequency Dispersion ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Emission Process

Metal-oxide-semiconductor capacitors with erbium oxide dielectrics on In0.53Ga0.47As channels

2009 ◽  
Vol 94 (12) ◽  
pp. 122907 ◽  
Author(s):  
Yoontae Hwang ◽  
Mark A. Wistey ◽  
Joël Cagnon ◽  
Roman Engel-Herbert ◽  
Susanne Stemmer
Keyword(s):  
Metal Oxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Erbium Oxide

scholarly journals Frequency dispersion in III-V metal-oxide-semiconductor capacitors

2012 ◽  
Vol 100 (23) ◽  
pp. 233510 ◽  
Author(s):  
Susanne Stemmer ◽  
Varistha Chobpattana ◽  
Siddharth Rajan
Keyword(s):  
Metal Oxide ◽  
Frequency Dispersion ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor

A model for the frequency dispersion of the high-k metal-oxide-semiconductor capacitance in accumulation

2012 ◽  
Vol 100 (22) ◽  
pp. 222903 ◽  
Author(s):  
B. Yao ◽  
Z. B. Fang ◽  
Y. Y. Zhu ◽  
T. Ji ◽  
G. He
Keyword(s):  
Metal Oxide ◽  
Frequency Dispersion ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
High K
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