scholarly journals Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

2017 ◽  
Vol 35 (5) ◽  
pp. 05C311 ◽  
Author(s):  
Emi Kawamura ◽  
De-Qi Wen ◽  
Michael A. Lieberman ◽  
Allan J. Lichtenberg
Keyword(s):  
Dielectric Layer ◽  
High Frequency ◽  
Capacitive Discharges

scholarly journals Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

2007 ◽  
Vol 90 (20) ◽  
pp. 201503 ◽  
Author(s):  
E. V. Barnat ◽  
P. A. Miller ◽  
G. A. Hebner ◽  
A. M. Paterson ◽  
Theodoros Panagopoulos ◽  
...  
Keyword(s):  
High Frequency ◽  
Radial Dependence ◽  
Very High Frequency ◽  
Capacitive Discharges ◽  
Very High

Ion energy uniformity in high-frequency capacitive discharges

2005 ◽  
Vol 86 (2) ◽  
pp. 021501 ◽  
Author(s):  
A. Perret ◽  
P. Chabert ◽  
J. Jolly ◽  
J.-P. Booth
Keyword(s):  
High Frequency ◽  
Ion Energy ◽  
Capacitive Discharges

Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges

2019 ◽  
Vol 26 (10) ◽  
pp. 103508 ◽  
Author(s):  
Sarveshwar Sharma ◽  
Nishant Sirse ◽  
Abhijit Sen ◽  
Miles M. Turner ◽  
Albert R. Ellingboe
Keyword(s):  
Electric Field ◽  
High Frequency ◽  
Very High Frequency ◽  
Discharge Parameters ◽  
Capacitive Discharges ◽  
Very High

Inductive heating and E to H transitions in high frequency capacitive discharges

2006 ◽  
Vol 15 (2) ◽  
pp. S130-S136 ◽  
Author(s):  
P Chabert ◽  
J-L Raimbault ◽  
P Levif ◽  
J-M Rax ◽  
M A Lieberman
Keyword(s):  
High Frequency ◽  
Inductive Heating ◽  
Capacitive Discharges
Sign in / Sign up

Export Citation Format

Share Document