Ion energy uniformity in high-frequency capacitive discharges

2005 ◽  
Vol 86 (2) ◽  
pp. 021501 ◽  
Author(s):  
A. Perret ◽  
P. Chabert ◽  
J. Jolly ◽  
J.-P. Booth
Keyword(s):  
High Frequency ◽  
Ion Energy ◽  
Capacitive Discharges

scholarly journals Comment on “Ion energy uniformity in high-frequency capacitive discharges” [Appl. Phys. Lett. 86, 021501 (2005)]

2005 ◽  
Vol 87 (7) ◽  
pp. 076101 ◽  
Author(s):  
A. A. Howling ◽  
L. Sansonnens ◽  
H. Schmidt ◽  
Ch. Hollenstein
Keyword(s):  
High Frequency ◽  
Ion Energy ◽  
Capacitive Discharges

scholarly journals Effect of a dielectric layer on plasma uniformity in high frequency electronegative capacitive discharges

2017 ◽  
Vol 35 (5) ◽  
pp. 05C311 ◽  
Author(s):  
Emi Kawamura ◽  
De-Qi Wen ◽  
Michael A. Lieberman ◽  
Allan J. Lichtenberg
Keyword(s):  
Dielectric Layer ◽  
High Frequency ◽  
Capacitive Discharges

The effect of ion energy on the surface morphology of platinum film under high-frequency ion plasma sputtering

2013 ◽  
Vol 39 (1) ◽  
pp. 130-133 ◽  
Author(s):  
I. I. Amirov ◽  
V. V. Naumov ◽  
M. O. Izyumov ◽  
R. S. Selyukov
Keyword(s):  
Surface Morphology ◽  
High Frequency ◽  
Ion Energy ◽  
Plasma Sputtering ◽  
Ion Plasma

scholarly journals Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

2007 ◽  
Vol 90 (20) ◽  
pp. 201503 ◽  
Author(s):  
E. V. Barnat ◽  
P. A. Miller ◽  
G. A. Hebner ◽  
A. M. Paterson ◽  
Theodoros Panagopoulos ◽  
...  
Keyword(s):  
High Frequency ◽  
Radial Dependence ◽  
Very High Frequency ◽  
Capacitive Discharges ◽  
Very High

The Influence of Ion Energy Distribution for Multiple Frequencies Driven

2013 ◽  
Vol 664 ◽  
pp. 947-953
Author(s):  
Zhu Wen Zhou ◽  
Yuan Sheng Wang ◽  
Bo Kong
Keyword(s):  
Integrated Circuit ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Low Frequencies ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Multiple Frequencies ◽  
Ion Energy Distributions ◽  
Capacitive Discharges ◽  
Good Agreement

The voltages, resonant waves and frequencies how to influence on the ion energy distributions (IEDs) from multiple frequencies driven in capacitive discharges, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequency) drive in capacitive discharges, we derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with these important data from public publish.

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