Investigation of the effects of a thin dielectric layer on low-pressure hydrogen capacitive discharges driven by combined radio frequency and pulse power sources
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1986 ◽
Vol 4
(3)
◽
pp. 1798-1799
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2017 ◽
Vol 35
(5)
◽
pp. 05C311
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2019 ◽
Vol 413
◽
pp. 139-147
◽
2019 ◽
Vol 1328
◽
pp. 012069