Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists
2017 ◽
Vol 35
(6)
◽
pp. 06GE02
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 34
◽
pp. 41-51
◽
2018 ◽
Vol 367
◽
pp. 124-127
◽
Keyword(s):
1992 ◽
Vol 5
(2)
◽
pp. 263-266