scholarly journals Variation in the density, optical polarizabilities, and crystallinity of TiO2thin films deposited via atomic layer deposition from 38 to 150 °C using the titanium tetrachloride-water reaction

2017 ◽  
Vol 35 (3) ◽  
pp. 03E107 ◽  
Author(s):  
Brandon D. Piercy ◽  
Collen Z. Leng ◽  
Mark D. Losego
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Layer Deposition

Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide

2014 ◽  
Vol 32 (1) ◽  
pp. 01A114 ◽  
Author(s):  
Virginia R. Anderson ◽  
Andrew S. Cavanagh ◽  
Aziz I. Abdulagatov ◽  
Zachary M. Gibbs ◽  
Steven M. George
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Titanium Tetraisopropoxide ◽  
Layer Deposition

Atomic Layer Deposition of Titanium Phosphate from Titanium Tetrachloride and Triethyl Phosphate onto Carbon Fibers

2018 ◽  
Vol 5 (16) ◽  
pp. 1800423 ◽  
Author(s):  
Christian Militzer ◽  
Julia Buchsbaum ◽  
Volodymyr Dzhagan ◽  
Dietrich R. T. Zahn ◽  
Harm Wulff ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Carbon Fibers ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Titanium Phosphate ◽  
Triethyl Phosphate ◽  
Layer Deposition

scholarly journals Role of HCl in Atomic Layer Deposition of TiO2Thin Films from Titanium Tetrachloride and Water

2014 ◽  
Vol 35 (4) ◽  
pp. 1195-1201 ◽  
Author(s):  
Jina Leem ◽  
Inhye Park ◽  
Yinshi Li ◽  
Wenhao Zhou ◽  
Zhenyu Jin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Tetrachloride ◽  
Atomic Layer ◽  
Layer Deposition

Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dye Sensitized ◽  
Layer Deposition
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