Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide
2014 ◽
Vol 32
(1)
◽
pp. 01A114
◽
2013 ◽
Vol 31
(3)
◽
pp. 031509
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Keyword(s):
Keyword(s):
2018 ◽
Vol 5
(16)
◽
pp. 1800423
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2017 ◽
Vol 35
(3)
◽
pp. 03E107
◽
2014 ◽
Vol 35
(4)
◽
pp. 1195-1201
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2015 ◽
Vol 27
(14)
◽
pp. 4918-4921
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2012 ◽
Vol 30
(1)
◽
pp. 01A150
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