scholarly journals Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

2017 ◽  
Vol 35 (1) ◽  
pp. 010801 ◽  
Author(s):  
Esko Ahvenniemi ◽  
Andrew R. Akbashev ◽  
Saima Ali ◽  
Mikhael Bechelany ◽  
Maria Berdova ◽  
...  
2020 ◽  
Vol 6 (7) ◽  
pp. 1765-1785
Author(s):  
Jieun Lee ◽  
In S. Kim ◽  
Moon-Hyun Hwang ◽  
Kyu-Jung Chae

This review article provides a summary of the application of ALD and electrospinning in membrane processes for water treatment and insight into the technological challenges and future perspectives for their wider application in the membrane industry.


2017 ◽  
Vol 4 (2) ◽  
pp. 133-154 ◽  
Author(s):  
Xiangbo Meng ◽  
Xinwei Wang ◽  
Dongsheng Geng ◽  
Cagla Ozgit-Akgun ◽  
Nathanaelle Schneider ◽  
...  

This review article summarizes the recent progress of atomic layer deposition (ALD) in energy technologies including rechargeable secondary batteries, fuel cells, photovoltaics, and optoelectronics.


2018 ◽  
Author(s):  
Riikka Puurunen

This work summarizes learnings from an Open Science effort “Virtual project on the History of ALD” (VPHA), started in 2013 to clarify the early history of atomic layer deposition (ALD). ALD is a multi-tool of nanotechnology and has been e.g. enabler of the continuation of Moore’s law of transistor scaling. ALD has been developed historically through two independent routes: atomic layer epitaxy (ALE) and molecular layering (ML). Especially the details on ML have remained little known to a broader audience. In this contribution, learnings in VPHA are seen from the viewpoint of its voluntary coordinator (the author self) related to historical details of ALD as well as from an organizational viewpoint and some other viewpoints. Selected details related to ALD’s history not fully accurately described in three earlier review articles are pointed out. The work made in VPHA has resulted in journal articles, presentations and an exhibition, and VPHA has in part provided the foundation for granting the 2018 Millennium Technology Prize to Dr. Tuomo Suntola. At the time of writing this contribution, in July 2018, VPHA is still on-going, and more volunteers are welcome to join the effort.


2013 ◽  
Vol 31 (5) ◽  
pp. 050818 ◽  
Author(s):  
Gregory N. Parsons ◽  
Jeffrey W. Elam ◽  
Steven M. George ◽  
Suvi Haukka ◽  
Hyeongtag Jeon ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document