scholarly journals Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development

2018 ◽  
Vol 36 (6) ◽  
pp. 060801 ◽  
Author(s):  
Jiazhen Sheng ◽  
Jung-Hoon Lee ◽  
Wan-Ho Choi ◽  
TaeHyun Hong ◽  
MinJung Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Research And Development ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Review Article ◽  
Oxide Semiconductor ◽  
Layer Deposition ◽  
Semiconductor Thin Film

36.3: Flexible ZnO Thin‐Film Transistors Fabricated on PEN Substrate by Atomic Layer Deposition at Low Temperature

2021 ◽  
Vol 52 (S2) ◽  
pp. 472-476
Author(s):  
Qi Li ◽  
Huijin Li ◽  
Junchen Dong ◽  
Jingyi Wang ◽  
Dedong Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thin Film Transistors ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition
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