Mechanistic modeling study of atomic layer deposition process optimization in a fluidized bed reactor

2017 ◽  
Vol 35 (1) ◽  
pp. 01B102 ◽  
Author(s):  
Chen-Long Duan ◽  
Peng-Hui Zhu ◽  
Zhang Deng ◽  
Yun Li ◽  
Bin Shan ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Fluidized Bed ◽  
Process Optimization ◽  
Atomic Layer ◽  
Fluidized Bed Reactor ◽  
Deposition Process ◽  
Mechanistic Modeling ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
Modeling Study

Low-temperature atomic layer deposition of ZnO films on particles in a fluidized bed reactor

2008 ◽  
Vol 516 (23) ◽  
pp. 8517-8523 ◽  
Author(s):  
David M. King ◽  
Xinhua Liang ◽  
Peng Li ◽  
Alan W. Weimer
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Fluidized Bed ◽  
Atomic Layer ◽  
Fluidized Bed Reactor ◽  
Zno Films ◽  
Layer Deposition

scholarly journals In Situ SiO2 Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiOx Atomic Layer Deposition Process

ACS Omega ◽  
2018 ◽  
Vol 3 (11) ◽  
pp. 14567-14574 ◽  
Author(s):  
Mantu K. Hudait ◽  
Michael B. Clavel ◽  
Jheng-Sin Liu ◽  
Shuvodip Bhattacharya
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Al 2 O 3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

2019 ◽  
Vol 217 (8) ◽  
pp. 1900237
Author(s):  
Zhen Zhu ◽  
Saoussen Merdes ◽  
Oili M. E. Ylivaara ◽  
Kenichiro Mizohata ◽  
Mikko J. Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Plasma ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

scholarly journals Thermal atomic layer deposition of gold nanoparticles: controlled growth and size selection for photocatalysis

Nanoscale ◽  
2020 ◽  
Vol 12 (16) ◽  
pp. 9005-9013 ◽  
Author(s):  
Fatemeh S. M. Hashemi ◽  
Fabio Grillo ◽  
Vikram R. Ravikumar ◽  
Dominik Benz ◽  
Ankit Shekhar ◽  
...  
Keyword(s):  
Gold Nanoparticles ◽  
Atomic Layer Deposition ◽  
Fluidized Bed ◽  
Au Nanoparticles ◽  
Atomic Layer ◽  
Fluidized Bed Reactor ◽  
Au Nanoparticle ◽  
Pulse Time ◽  
Layer Deposition ◽  
Selection For

Thermal atomic layer deposition of Au nanoparticles on titania in a fluidized bed reactor. Effects of precursor pulse time on Au nanoparticle size and loading.

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