Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition

2016 ◽  
Vol 34 (1) ◽  
pp. 01A108 ◽  
Author(s):  
Zhang Deng ◽  
Wenjie He ◽  
Chenlong Duan ◽  
Rong Chen ◽  
Bin Shan
Keyword(s):  
Atomic Layer Deposition ◽  
Process Optimization ◽  
Atomic Layer ◽  
Mechanistic Modeling ◽  
Layer Deposition ◽  
Modeling Study

scholarly journals Atomic layer deposition in porous electrodes: A pore-scale modeling study

2019 ◽  
Vol 378 ◽  
pp. 122099 ◽  
Author(s):  
Wen-Zhen Fang ◽  
Yu-Qing Tang ◽  
Chunmei Ban ◽  
Qinjun Kang ◽  
Rui Qiao ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Porous Electrodes ◽  
Pore Scale ◽  
Scale Modeling ◽  
Layer Deposition ◽  
Pore Scale Modeling ◽  
Modeling Study

Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties

2013 ◽  
Vol 1 (25) ◽  
pp. 3939 ◽  
Author(s):  
Ke Xu ◽  
Ayan Roy Chaudhuri ◽  
Harish Parala ◽  
Dominik Schwendt ◽  
Teresa de los Arcos ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Process Optimization ◽  
Atomic Layer ◽  
Film Analysis ◽  
Layer Deposition

Growth process optimization of ZnO thin film using atomic layer deposition

2016 ◽  
Vol 3 (12) ◽  
pp. 126402 ◽  
Author(s):  
Binbin Weng ◽  
Jingyu Wang ◽  
Preston Larson ◽  
Yingtao Liu
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Process Optimization ◽  
Growth Process ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dye Sensitized ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document