Investigation of breakdown mechanism during field emission process of AlN thin film microscopic cold cathode

Author(s):  
Feng Liang ◽  
Ping Chen ◽  
Degang Zhao ◽  
Desheng Jiang ◽  
Zongshun Liu ◽  
...  
2009 ◽  
Vol 109 (5) ◽  
pp. 385-389 ◽  
Author(s):  
Geng Zhang ◽  
Jun Chen ◽  
S.Z. Deng ◽  
J.C. She ◽  
N.S. Xu

2005 ◽  
Vol 44 (6A) ◽  
pp. 4108-4111 ◽  
Author(s):  
Daiji Noda ◽  
Kei Hagiwara ◽  
Toshihiro Yamamoto ◽  
Shinji Okamoto

1999 ◽  
Vol 593 ◽  
Author(s):  
B. L. Weiss ◽  
A. Badzian ◽  
L. Pilione ◽  
T. Badzian ◽  
W. Drawl ◽  
...  

ABSTRACTElectron field emission measurements have been performed on thin film cold cathode materials grown, on molybdenum, by a modified MPACVD diamond process. Specifically the modification is due to the addition of nitrogen and oxygen, in varying ratios, during the diamond growth phase. Characterization using Raman spectroscopy shows features at 1190, 1330 and 1550 cm−1. A simple triode device was fabricated for electron emission characterization. KAPTON® film is used as the insulating layer and a Mo mesh is used as the extraction gate electrode. The collector is an indium tin oxide (ITO) coated glass plate which is positively biased with respect to the gate electrode. Field emission characteristics have shown current measurements of greater than I microamp for fields of 40 V/micron. Gate currents are typically 1000 times greater than the emitted current. Issues currently being addressed include improvement in the total emitted current, current stability and device failure. We also present field emission measurements on diamond films grown by HFCVD.


Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.


1996 ◽  
Vol 424 ◽  
Author(s):  
J Robertson ◽  
W I Milne

AbstractDiamond-like carbon is a strong candidate for field emission microcathodes for field emission displays because of its low electron affinity and chemical inertness. The field emission properties of various types of diamond-like carbon such as a-C:H and ta-C are reviewed in the framework of a bonding model of their affinity.


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