scholarly journals Correlation between dry etching resistance of Ta masks and the oxidation states of the surface oxide layers

2015 ◽  
Vol 33 (5) ◽  
pp. 051810 ◽  
Author(s):  
Makoto Satake ◽  
Masaki Yamada ◽  
Hu Li ◽  
Kazuhiro Karahashi ◽  
Satoshi Hamaguchi
Keyword(s):  
Dry Etching ◽  
Surface Oxide ◽  
Oxidation States ◽  
Oxide Layers

scholarly journals Enhanced osteogenic activity of Ti alloy implants by modulating strontium configuration in their surface oxide layers

RSC Advances ◽  
2018 ◽  
Vol 8 (6) ◽  
pp. 3051-3060 ◽  
Author(s):  
Zhengjiang Xu ◽  
Huaifeng Lu ◽  
Jian Lu ◽  
Chen Lv ◽  
Xiaobing Zhao ◽  
...  
Keyword(s):  
Surface Oxide ◽  
Ti Alloy ◽  
Coating System ◽  
Oxide Layers ◽  
Osteogenic Activity

Strontium configurations can modulate its release in the SrO–TiO2coating system, thus being able to control the interfacial osteogenesis.

Role of N2 during chemical dry etching of silicon oxide layers using NF3/N2/Ar remote plasmas

2007 ◽  
Vol 84 (4) ◽  
pp. 560-566 ◽  
Author(s):  
D.J. Kim ◽  
Y.B. Yun ◽  
J.Y. Hwang ◽  
N.-E. Lee ◽  
K.S. Kim ◽  
...  
Keyword(s):  
Silicon Oxide ◽  
Dry Etching ◽  
Oxide Layers
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