High-throughput nanogap formation by field-emission-induced electromigration

2015 ◽  
Vol 33 (5) ◽  
pp. 051801 ◽  
Author(s):  
Mitsuki Ito ◽  
Kohei Morihara ◽  
Takahiro Toyonaka ◽  
Kazuki Takikawa ◽  
Jun-ichi Shirakashi
Keyword(s):  
Field Emission ◽  
High Throughput

scholarly journals Development of High Throughput Cryo Electron Microscope with Cold Field Emission Gun (CRYO ARMTM 300Ⅱ)

2021 ◽  
Vol 27 (S1) ◽  
pp. 1634-1636
Author(s):  
Akihiro Oosaki ◽  
Naoki Hosogi ◽  
Fumiaki Makino ◽  
Sohei Motoki ◽  
Isamu Ishikawa ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
High Throughput

SU-FF-J-156: High Throughput Micro-CT Scanner Using a Distributed Multi-Beam Field Emission X-Ray Source

2009 ◽  
Vol 36 (6Part8) ◽  
pp. 2513-2513
Author(s):  
R Peng ◽  
J Zhang ◽  
X Calderon-Colon ◽  
E Quan ◽  
S Wang ◽  
...  
Keyword(s):  
Field Emission ◽  
High Throughput ◽  
Micro Ct ◽  
Ct Scanner ◽  
X Ray

A High Throughput Electron Lithography System Using A Field Emission Gun

1989 ◽  
Author(s):  
W. B. Thompson ◽  
Y. Nakagawa ◽  
M. Hassel Shearer ◽  
H. Nakazawa ◽  
H. Takemura ◽  
...  
Keyword(s):  
Field Emission ◽  
High Throughput ◽  
Electron Lithography ◽  
Lithography System

Observation of Phase Contrast Images in STEM and CTEM Modes by Using 100 kV Field Emission Electron Gun

1974 ◽  
Vol 32 ◽  
pp. 390-391
Author(s):  
Y. Harada ◽  
T. Goto ◽  
H. Koike ◽  
T. Someya
Keyword(s):  
Field Emission ◽  
Phase Contrast ◽  
Image Formation ◽  
Fresnel Diffraction ◽  
Experimental Results ◽  
Electron Gun ◽  
Scanning Microscopy ◽  
Emission Electron ◽  
Lattice Images

Since phase contrasts of STEM images, that is, Fresnel diffraction fringes or lattice images, manifest themselves in field emission scanning microscopy, the mechanism for image formation in the STEM mode has been investigated and compared with that in CTEM mode, resulting in the theory of reciprocity. It reveals that contrast in STEM images exhibits the same properties as contrast in CTEM images. However, it appears that the validity of the reciprocity theory, especially on the details of phase contrast, has not yet been fully proven by the experiments. In this work, we shall investigate the phase contrast images obtained in both the STEM and CTEM modes of a field emission microscope (100kV), and evaluate the validity of the reciprocity theory by comparing the experimental results.

A New Image Processing Technique for STEM

1974 ◽  
Vol 32 ◽  
pp. 432-433
Author(s):  
Yasushi Kokubo ◽  
Hirotami Koike ◽  
Teruo Someya
Keyword(s):  
Electron Microscopy ◽  
Image Processing ◽  
Scanning Electron Microscopy ◽  
Elastic Scattering ◽  
Field Emission ◽  
Processing Technique ◽  
Image Processing Technique ◽  
Energy Analyzer ◽  
Scanning Microscope ◽  
Scanning Electron

One of the advantages of scanning electron microscopy is the capability for processing the image contrast, i.e., the image processing technique. Crewe et al were the first to apply this technique to a field emission scanning microscope and show images of individual atoms. They obtained a contrast which depended exclusively on the atomic numbers of specimen elements (Zcontrast), by displaying the images treated with the intensity ratio of elastically scattered to inelastically scattered electrons. The elastic scattering electrons were extracted by a solid detector and inelastic scattering electrons by an energy analyzer. We noted, however, that there is a possibility of the same contrast being obtained only by using an annular-type solid detector consisting of multiple concentric detector elements.

Observation of Atom Rows in Thorium Pyromellitate Using a Field Emission STEM

1977 ◽  
Vol 35 ◽  
pp. 80-81
Author(s):  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda
Keyword(s):  
Field Emission ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Dark Field Image ◽  
Dark Field ◽  
Amorphous Carbon Film ◽  
Atomic Size ◽  
Wide Range ◽  
A Chain

It is interesting to observe polymers at atomic size resolution. Some works have been reported for thorium pyromellitate by using a STEM (1), or a CTEM (2,3). The results showed that this polymer forms a chain in which thorium atoms are arranged. However, the distance between adjacent thorium atoms varies over a wide range (0.4-1.3nm) according to the different authors.The present authors have also observed thorium pyromellitate specimens by means of a field emission STEM, described in reference 4. The specimen was prepared by placing a drop of thorium pyromellitate in 10-3 CH3OH solution onto an amorphous carbon film about 2nm thick. The dark field image is shown in Fig. 1A. Thorium atoms are clearly observed as regular atom rows having a spacing of 0.85nm. This lattice gradually deteriorated by successive observations. The image changed to granular structures, as shown in Fig. 1B, which was taken after four scanning frames.

A Stable Field Emission Electron Source

1977 ◽  
Vol 35 ◽  
pp. 58-59
Author(s):  
W.R. Bottoms ◽  
G.B. Haydon
Keyword(s):  
Field Emission ◽  
Signal To Noise Ratio ◽  
High Brightness ◽  
Electron Sources ◽  
Brightness Field ◽  
Current Densities ◽  
Properties Of Materials ◽  
Stable Field ◽  
Stable Current ◽  
Careful Design

There is great interest in improving the brightness of electron sources and therefore the ability of electron optical instrumentation to probe the properties of materials. Extensive work by Dr. Crew and others has provided extremely high brightness sources for certain kinds of analytical problems but which pose serious difficulties in other problems. These sources cannot survive in conventional system vacuums. If one wishes to gather information from the other signal channels activated by electron beam bombardment it is necessary to provide sufficient current to allow an acceptable signal-to-noise ratio. It is possible through careful design to provide a high brightness field emission source which has the capability of providing high currents as well as high current densities to a specimen. In this paper we describe an electrode to provide long-lived stable current in field emission sources.The source geometry was based upon the results of extensive computer modeling. The design attempted to maximize the total current available at a specimen.

Field Emission SEM Equipped With Noise Compensator

1973 ◽  
Vol 31 ◽  
pp. 302-303
Author(s):  
S. Saito ◽  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Field Emission ◽  
Low Contrast ◽  
Probe Current ◽  
High Resolution Images ◽  
Scanning Electron

Field emission scanning electron microscope (FESEM) features extremely high resolution images, and offers many valuable information. But, for a specimen which gives low contrast images, lateral stripes appear in images. These stripes are resulted from signal fluctuations caused by probe current noises. In order to obtain good images without stripes, the fluctuations should be less than 1%, especially for low contrast images. For this purpose, the authors realized a noise compensator, and applied this to the FESEM.Fig. 1 shows an outline of FESEM equipped with a noise compensator. Two apertures are provided gust under the field emission gun.

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