Observation of radio frequency ring-shaped hollow cathode discharge plasma with MgO and Al electrodes for plasma processing

2014 ◽  
Vol 32 (3) ◽  
pp. 031304 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Naoki Matsumoto
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Discharge Plasma ◽  
Plasma Processing ◽  
Hollow Cathode Discharge

Plasma processing of AISI 304 stainless steel using radio frequency hollow cathode discharge

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8650-8653 ◽  
Author(s):  
X.B. Tian ◽  
H.F. Jiang ◽  
S.Q. Yang ◽  
Z.J. Luo ◽  
R.K.Y. Fu ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Hollow Cathode Discharge ◽  
304 Stainless Steel ◽  
Aisi 304 Stainless Steel ◽  
Aisi 304

Optogalvanic effect sign change in a hollow cathode discharge plasma

Vacuum ◽  
2000 ◽  
Vol 58 (2-3) ◽  
pp. 272-279 ◽  
Author(s):  
M Janossy ◽  
S Gateva ◽  
Ch Andreeva ◽  
S Cartaleva
Keyword(s):  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Optogalvanic Effect ◽  
Sign Change

The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

2014 ◽  
Vol 16 (7) ◽  
pp. 669-676 ◽  
Author(s):  
Guoming Zhao ◽  
Qian Sun ◽  
Shuxia Zhao ◽  
Shuxia Gao ◽  
Lianzhu Zhang
Keyword(s):  
Radio Frequency ◽  
Flow Rate ◽  
Hollow Cathode ◽  
Gas Flow ◽  
Hollow Cathode Discharge ◽  
Gas Flow Rate ◽  
Discharge Characteristics

DLC deposition inside tubes using hollow cathode discharge plasma immersion ion implantation and deposition

2010 ◽  
Vol 204 (18-19) ◽  
pp. 2909-2912 ◽  
Author(s):  
X.B. Tian ◽  
H.F. Jiang ◽  
C.Z. Gong ◽  
S.Q. Yang ◽  
R.K.Y. Fu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Plasma Immersion Ion Implantation

Influence of wall heating on CF2 radical in CF4 hollow cathode discharge plasma

2000 ◽  
Vol 50 (S3) ◽  
pp. 293-296
Author(s):  
Toshihiko Arai ◽  
Satoshi Aikyo ◽  
Miki Goto
Keyword(s):  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Wall Heating
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