Criteria of radio-frequency ring-shaped hollow cathode discharge using H2 and Ar gases for plasma processing

2013 ◽  
Vol 113 (3) ◽  
pp. 033302 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Yujiro Kawasaki
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Hollow Cathode Discharge

Plasma processing of AISI 304 stainless steel using radio frequency hollow cathode discharge

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8650-8653 ◽  
Author(s):  
X.B. Tian ◽  
H.F. Jiang ◽  
S.Q. Yang ◽  
Z.J. Luo ◽  
R.K.Y. Fu ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Hollow Cathode Discharge ◽  
304 Stainless Steel ◽  
Aisi 304 Stainless Steel ◽  
Aisi 304

The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

2014 ◽  
Vol 16 (7) ◽  
pp. 669-676 ◽  
Author(s):  
Guoming Zhao ◽  
Qian Sun ◽  
Shuxia Zhao ◽  
Shuxia Gao ◽  
Lianzhu Zhang
Keyword(s):  
Radio Frequency ◽  
Flow Rate ◽  
Hollow Cathode ◽  
Gas Flow ◽  
Hollow Cathode Discharge ◽  
Gas Flow Rate ◽  
Discharge Characteristics

Hollow cathode and hybrid atmospheric plasma sources

2008 ◽  
Vol 80 (9) ◽  
pp. 1931-1937 ◽  
Author(s):  
Hana Baránková ◽  
Ladislav Bardos
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Hollow Cathode Discharge ◽  
Atmospheric Plasma ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Hollow Electrode

Generation and features of the radio frequency (RF) hollow cathode discharge (HCD) are compared for the atmospheric and moderate pressures. The atmospheric-pressure plasma systems, fused hollow cathode (FHC) and hybrid hollow electrode-activated discharge (H-HEAD), are described. Examples of applications where both FHC and H-HEAD have already been employed are given, and potentials for new processes are discussed.

Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing

2001 ◽  
Vol 90 (4) ◽  
pp. 1703-1709 ◽  
Author(s):  
L. Bárdoš ◽  
H. Baránková ◽  
Th. Welzel ◽  
I. Dani ◽  
S. Peter ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Microwave Antenna

Production of High-Density Radio-Frequency Plasma Source by Ring-Shaped Hollow-Cathode Discharge at Various Trench Shapes

2013 ◽  
Vol 41 (8) ◽  
pp. 1856-1862 ◽  
Author(s):  
Yasunori Ohtsu ◽  
Yoshiki Yahata ◽  
Johji Kagami ◽  
Yasushi Kawashimo ◽  
Tatsuya Takeuchi
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Plasma Source ◽  
High Density ◽  
Hollow Cathode Discharge ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Experimental and Theoretical Optimization of Radio Frequency Hollow Cathode Discharge

2016 ◽  
Vol 37 (4) ◽  
pp. 1281-1290 ◽  
Author(s):  
Xin-Xian Jiang ◽  
Wei-Ping Li ◽  
Shao-Wei Xu ◽  
Feng He ◽  
Qiang Chen
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge

Numerical simulation of the sustaining discharge in radio frequency hollow cathode discharge in argon

2014 ◽  
Vol 21 (3) ◽  
pp. 033508 ◽  
Author(s):  
Xin-Xian Jiang ◽  
Feng He ◽  
Qiang Chen ◽  
Teng Ge ◽  
Ji-Ting Ouyang
Keyword(s):  
Numerical Simulation ◽  
Radio Frequency ◽  
Hollow Cathode ◽  
Hollow Cathode Discharge
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