Role of the blocking capacitor in control of ion energy distributions in pulsed capacitively coupled plasmas sustained in Ar/CF4/O2

2014 ◽  
Vol 32 (2) ◽  
pp. 021306 ◽  
Author(s):  
Sang-Heon Song ◽  
Mark J. Kushner
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

2015 ◽  
Vol 117 (23) ◽  
pp. 233302 ◽  
Author(s):  
Yiting Zhang ◽  
Abdullah Zafar ◽  
David J. Coumou ◽  
Steven C. Shannon ◽  
Mark J. Kushner
Keyword(s):  
Phase Shifting ◽  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

scholarly journals Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

2012 ◽  
Vol 21 (6) ◽  
pp. 065009 ◽  
Author(s):  
Michael D Logue ◽  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/CF4 plasma

2010 ◽  
Vol 17 (3) ◽  
pp. 033501 ◽  
Author(s):  
Zhi-Cheng Li ◽  
Da-Lei Chang ◽  
Xiao-Song Li ◽  
Zhen-Hua Bi ◽  
Wen-Qi Lu ◽  
...  
Keyword(s):  
Experimental Investigation ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distributions
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