Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas

AIChE Journal ◽  
2013 ◽  
Vol 59 (9) ◽  
pp. 3214-3222 ◽  
Author(s):  
Paola Diomede ◽  
Doosik Kim ◽  
Demetre J. Economou
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

2015 ◽  
Vol 117 (23) ◽  
pp. 233302 ◽  
Author(s):  
Yiting Zhang ◽  
Abdullah Zafar ◽  
David J. Coumou ◽  
Steven C. Shannon ◽  
Mark J. Kushner
Keyword(s):  
Phase Shifting ◽  
Energy Distributions ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas

scholarly journals Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

2012 ◽  
Vol 21 (6) ◽  
pp. 065009 ◽  
Author(s):  
Michael D Logue ◽  
Hyungjoo Shin ◽  
Weiye Zhu ◽  
Lin Xu ◽  
Vincent M Donnelly ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Energy Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Ion Energy Distributions ◽  
Coupled Plasmas
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