Size-independent low voltage of InGaN micro-light-emitting diodes with epitaxial tunnel junctions using selective area growth by metalorganic chemical vapor deposition

Panpan Li; Haojun Zhang; Hongjian Li; Mike Iza; Yifan Yao; Matthew S. Wong; Nathan Palmquist; James S. Speck; Shuji Nakamura; Steven P. DenBaars

doi:10.1364/oe.394664

Size-independent low voltage of InGaN micro-light-emitting diodes with epitaxial tunnel junctions using selective area growth by metalorganic chemical vapor deposition

Optics Express ◽

10.1364/oe.394664 ◽

2020 ◽

Vol 28 (13) ◽

pp. 18707

Author(s):

Panpan Li ◽

Haojun Zhang ◽

Hongjian Li ◽

Mike Iza ◽

Yifan Yao ◽

...

Keyword(s):

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Low Voltage ◽

Tunnel Junctions ◽

Chemical Vapor ◽

Selective Area Growth ◽

Light Emitting ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Selective area growth of InP on lithography-free, nanopatterned GaAs(001) by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4855035 ◽

2014 ◽

Vol 32 (1) ◽

pp. 011210 ◽

Cited By ~ 1

Author(s):

Qi Wang ◽

Zhiqiang Bian ◽

Zhigang Jia ◽

Zhihong Pan ◽

Shiwei Cai ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Mechanism of selective area growth of GaN nanorods by pulsed mode metalorganic chemical vapor deposition

Nanotechnology ◽

10.1088/0957-4484/23/46/465601 ◽

2012 ◽

Vol 23 (46) ◽

pp. 465601 ◽

Cited By ~ 35

Author(s):

Yen-Ting Lin ◽

Ting-Wei Yeh ◽

P Daniel Dapkus

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Pulsed Mode ◽

Area Growth ◽

Metalorganic Chemical

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Fabrication and modeling of optical interconnects using selective area growth metalorganic chemical vapor deposition

Conference Digest. ISLC 1998 NARA. 1998 IEEE 16th International Semiconductor Laser Conference (Cat. No. 98CH361130) ◽

10.1109/islc.1998.734204 ◽

2002 ◽

Author(s):

M.A. Alam ◽

R. People ◽

S.K. Sputz ◽

M.S. Hybertsen ◽

E. Isaacs ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Optical Interconnects ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Selective area growth and characterization of AlGaN/GaN heterojunction bipolar transistors by metalorganic chemical vapor deposition

IEEE Transactions on Electron Devices ◽

10.1109/16.906441 ◽

2001 ◽

Vol 48 (3) ◽

pp. 490-494 ◽

Cited By ~ 29

Author(s):

B.S. Shelton ◽

D.J.H. Lambert ◽

Jian Jang Huang ◽

M.M. Wong ◽

U. Chowdhury ◽

...

Keyword(s):

Heterojunction Bipolar Transistors ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Bipolar Transistors ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Index guided single stripe lasers fabricated by selective area growth in a metalorganic chemical vapor deposition system

Journal of Applied Physics ◽

10.1063/1.339426 ◽

1987 ◽

Vol 62 (6) ◽

pp. 2569-2570 ◽

Cited By ~ 2

Author(s):

J. J. Yang ◽

S. S. Ou ◽

M. Jansen ◽

J. Wilcox ◽

M. Sergant

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Metalorganic chemical vapor deposition of GaN nanowires: From catalyst-assisted to catalyst-free growth, and from self-assembled to selective-area growth

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.03.025 ◽

2016 ◽

Vol 55 ◽

pp. 51-58 ◽

Cited By ~ 7

Author(s):

Blandine Alloing ◽

Jesús Zúñiga-Pérez

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Gan Nanowires ◽

Selective Area ◽

Area Growth ◽

Free Growth ◽

Metalorganic Chemical

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Selective area growth of GaN nanowires using metalorganic chemical vapor deposition on nano-patterned Si(111) formed by the etching of nano-sized Au droplets

Thin Solid Films ◽

10.1016/j.tsf.2011.06.083 ◽

2011 ◽

Vol 520 (1) ◽

pp. 126-130 ◽

Cited By ~ 5

Author(s):

Ki-Young Song ◽

R. Navamathavan ◽

Ji-Hyeon Park ◽

Yeom-Bo Ra ◽

Yong-Ho Ra ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Selective Area Growth ◽

Gan Nanowires ◽

Selective Area ◽

Area Growth ◽

Metalorganic Chemical

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Metalorganic chemical vapor deposition-grown tunnel junctions for low forward voltage InGaN light-emitting diodes: epitaxy optimization and light extraction simulation

Semiconductor Science and Technology ◽

10.1088/1361-6641/abe0f7 ◽

2021 ◽

Vol 36 (3) ◽

pp. 035019

Author(s):

Panpan Li ◽

Hongjian Li ◽

Haojun Zhang ◽

Mike Iza ◽

James S Speck ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Light Emitting Diodes ◽

Tunnel Junctions ◽

Chemical Vapor ◽

Light Extraction ◽

Forward Voltage ◽

Light Emitting ◽

Metalorganic Chemical

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Minimization of wafer bowing in GaN-based vertical light-emitting diodes by selective area growth using metal-organic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2010.10.104 ◽

2011 ◽

Vol 314 (1) ◽

pp. 66-70 ◽

Cited By ~ 2

Author(s):

Jae Hyoung Ryu ◽

S. Chandramohan ◽

Hee Yun Kim ◽

Hyun Kyu Kim ◽

Ji Hye Kang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Selective Area Growth ◽

Light Emitting ◽

Selective Area ◽

Area Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Metalorganic chemical vapor deposition grown n-InGaN/n-GaN tunnel junctions for micro-light-emitting diodes with very low forward voltage

Semiconductor Science and Technology ◽

10.1088/1361-6641/abbd5b ◽

2020 ◽

Vol 35 (12) ◽

pp. 125023

Author(s):

Panpan Li ◽

Haojun Zhang ◽

Hongjian Li ◽

Yuewei Zhang ◽

Yifan Yao ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Light Emitting Diodes ◽

Tunnel Junctions ◽

Chemical Vapor ◽

Forward Voltage ◽

Light Emitting ◽

Metalorganic Chemical

Download Full-text