Structure in multilayer films of zinc sulfide and copper sulfide via atomic layer deposition

2014 ◽  
Vol 32 (1) ◽  
pp. 01A125 ◽  
Author(s):  
Andrew Short ◽  
Leila Jewell ◽  
Anthony Bielecki ◽  
Trevor Keiber ◽  
Frank Bridges ◽  
...  
2021 ◽  
pp. 2009323
Author(s):  
Thomas Lange ◽  
Sven Reichenberger ◽  
Markus Rohe ◽  
Mathias Bartsch ◽  
Laura Kampermann ◽  
...  

2017 ◽  
Vol 35 (1) ◽  
pp. 01B111 ◽  
Author(s):  
Jakob Kuhs ◽  
Thomas Dobbelaere ◽  
Zeger Hens ◽  
Christophe Detavernier

2016 ◽  
Vol 600 ◽  
pp. 103-108 ◽  
Author(s):  
Nathanaelle Schneider ◽  
Daniel Lincot ◽  
Frédérique Donsanti

2018 ◽  
Vol 1 (12) ◽  
pp. 7220-7229
Author(s):  
N. Schneider ◽  
L. Duclaux ◽  
M. Bouttemy ◽  
C. Bugot ◽  
F. Donsanti ◽  
...  

MRS Advances ◽  
2018 ◽  
Vol 3 (23) ◽  
pp. 1285-1290
Author(s):  
Takuji Tsujita ◽  
Yukihiro Morita ◽  
Mikihiko Nishitani

ABSTRACTMultilayer films formed from Al2O3 and TiO2 by atomic layer deposition were systematically studied. The relationship between the electrical characteristics of the films and the type of oxidizer used for the Al2O3 layers was investigated. The results indicated that oxygen defects in TiO2 layer and a highly insulating Al2O3 layer are necessary for realizing a giant dielectric constant and a low dielectric loss. A high electrical resistance of 1.7×108 Ω / diameter of 1 mm and a dielectric constant of 1140 were achieved at 100 Hz by suitable choice of oxidizer for the Al2O3 layer.


2013 ◽  
Vol 52 (10S) ◽  
pp. 10MB19
Author(s):  
Dongjun Yoo ◽  
Seung Chan Heo ◽  
Moon Suk Choi ◽  
Dohyung Kim ◽  
Chulwon Chung ◽  
...  

2013 ◽  
Vol 6 (6) ◽  
pp. 1868 ◽  
Author(s):  
Alex B. F. Martinson ◽  
Shannon C. Riha ◽  
Elijah Thimsen ◽  
Jeffrey W. Elam ◽  
Michael J. Pellin

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