Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching

2014 ◽  
Vol 32 (1) ◽  
pp. 011204 ◽  
Author(s):  
Iván Prieto González ◽  
Luis Enrique Muñoz Camuñez ◽  
Alfonso González Taboada ◽  
Carmen Robles Urdiales ◽  
Jose María Ripalda Cobián ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Quality Factor ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Wet Etching ◽  
High Quality Factor ◽  
High Quality ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Photonic Crystal Microcavities

scholarly journals Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

2007 ◽  
Vol 56 (2) ◽  
pp. 977
Author(s):  
Ma Xiao-Tao ◽  
Zheng Wan-Hua ◽  
Ren Gang ◽  
Fan Zhong-Chao ◽  
Chen Liang-Hui
Keyword(s):  
Photonic Crystal ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

scholarly journals Fabrication-tolerant high quality factor photonic crystal microcavities

2004 ◽  
Vol 12 (7) ◽  
pp. 1458 ◽  
Author(s):  
Kartik Srinivasan ◽  
Paul E. Barclay ◽  
Oskar Painter
Keyword(s):  
Photonic Crystal ◽  
Quality Factor ◽  
High Quality Factor ◽  
High Quality ◽  
Photonic Crystal Microcavities
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