scholarly journals Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure

AIP Advances ◽  
2013 ◽  
Vol 3 (2) ◽  
pp. 022122 ◽  
Author(s):  
Kaiyu Cui ◽  
Yongzhuo Li ◽  
Xue Feng ◽  
Yidong Huang ◽  
Wei Zhang
Keyword(s):  
Photonic Crystal ◽  
Aspect Ratio ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Photonic Crystal Waveguide ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

scholarly journals Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

2007 ◽  
Vol 56 (2) ◽  
pp. 977
Author(s):  
Ma Xiao-Tao ◽  
Zheng Wan-Hua ◽  
Ren Gang ◽  
Fan Zhong-Chao ◽  
Chen Liang-Hui
Keyword(s):  
Photonic Crystal ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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