Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regime

2013 ◽  
Vol 31 (6) ◽  
pp. 061604 ◽  
Author(s):  
Friedemann Völklein ◽  
Mario Grau ◽  
Andreas Meier ◽  
Grit Hemer ◽  
Lars Breuer ◽  
...  
Keyword(s):  
Pressure Measurement ◽  
High Vacuum ◽  
Measurement Sensitivity ◽  
Increased Pressure

Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes

2015 ◽  
Vol 33 (2) ◽  
pp. 021601 ◽  
Author(s):  
Mario Grau ◽  
Friedemann Völklein ◽  
Andreas Meier ◽  
Christina Kunz ◽  
Ilia Kaufmann ◽  
...  
Keyword(s):  
Pressure Measurement ◽  
Measurement Sensitivity ◽  
Increased Pressure

scholarly journals Extremely-high vacuum system for the pressure measurement using the laser-ionization method.

Shinku ◽  
1991 ◽  
Vol 34 (1) ◽  
pp. 14-16 ◽  
Author(s):  
Kiyohide KOKUBUN ◽  
Hazime SHIMIZU ◽  
Shingo ICHIMURA ◽  
Humio KAWAHARA ◽  
Minoru KONDO
Keyword(s):  
Pressure Measurement ◽  
High Vacuum ◽  
Vacuum System ◽  
Laser Ionization ◽  
Ionization Method

scholarly journals Pressure measurement of aluminum alloy extremely high vacuum chamber.

Shinku ◽  
1989 ◽  
Vol 32 (3) ◽  
pp. 403-406
Author(s):  
Fumio WATANABE ◽  
Kenzabro SUGISAKI ◽  
Hajime ISHIMARU
Keyword(s):  
Aluminum Alloy ◽  
Pressure Measurement ◽  
Vacuum Chamber ◽  
High Vacuum ◽  
High Vacuum Chamber

scholarly journals Application of Flash Desorption for Pressure Measurement in Extremely High Vacuum.

Shinku ◽  
1992 ◽  
Vol 35 (12) ◽  
pp. 988-994 ◽  
Author(s):  
Satoshi FUJIMOTO ◽  
Yuko HIROHATA ◽  
Tomoaki HINO ◽  
Tohiro YAMASHINA ◽  
Toshio KIKUCHI ◽  
...  
Keyword(s):  
Pressure Measurement ◽  
High Vacuum ◽  
Flash Desorption

scholarly journals Total pressure measurement in extremely high vacuum region.

Shinku ◽  
1987 ◽  
Vol 30 (12) ◽  
pp. 968-973
Author(s):  
Toru KANAJI ◽  
Toshio URANO
Keyword(s):  
Pressure Measurement ◽  
Total Pressure ◽  
High Vacuum ◽  
Vacuum Region
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