Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes
2015 ◽
Vol 33
(2)
◽
pp. 021601
◽
2013 ◽
Vol 31
(6)
◽
pp. 061604
◽
1988 ◽
Vol 52
(9)
◽
pp. 519-521
2016 ◽
Vol 136
(9)
◽
pp. 370-376