Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study
2013 ◽
Vol 31
(6)
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pp. 06F101
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2014 ◽
Vol 118
(31)
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pp. 17655-17661
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2019 ◽
Vol 37
(2)
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pp. 020927
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2017 ◽
Vol 147
(15)
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pp. 154702
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2015 ◽
Vol 119
(6)
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pp. 3379-3387
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