Biaxial texture development in aluminum nitride layers during off-axis sputter deposition

2012 ◽  
Vol 30 (5) ◽  
pp. 051501 ◽  
Author(s):  
Ruopeng Deng ◽  
Paul Muralt ◽  
Daniel Gall
Keyword(s):  
Aluminum Nitride ◽  
Sputter Deposition ◽  
Texture Development ◽  
Biaxial Texture ◽  
Nitride Layers

Texturing effects in molybdenum and aluminum nitride films correlated to energetic bombardment during sputter deposition

2001 ◽  
Vol 72 (5) ◽  
pp. 541-550 ◽  
Author(s):  
T.P. Drüsedau ◽  
K. Koppenhagen ◽  
J. Bläsing ◽  
T.-M. John
Keyword(s):  
Aluminum Nitride ◽  
Sputter Deposition

Synthesis of Alumina and Aluminum Nitride Layers on a Graphitic Substrate via a Sol-Gel Route

2010 ◽  
Vol 63 ◽  
pp. 24-29
Author(s):  
Florian Fontaine ◽  
René Pailler ◽  
Alain Guette
Keyword(s):  
Heat Treatment ◽  
Aluminum Nitride ◽  
Sol Gel ◽  
Nitride Layer ◽  
Carbon Substrate ◽  
Alumina Layer ◽  
Turbostratic Carbon ◽  
Treatment Conditions ◽  
Nitride Layers ◽  
The Impact

In this study, our objective is to deposit an alumina or an aluminum nitride layer on a turbostratic carbon substrate. The coatings are synthesized via a sol-gel route followed by a heat treatment in order to obtain -alumina or hexagonal aluminum nitride by carbothermal nitridation of alumina. The synthesis of such layers on carbon substrates is not reported in literature. Several slurries were elaborated using various solvents and catalysts, and aluminum-tri-sec-butoxide as an aluminum precursor. The coating is obtained by dropping the substrate in the sol. After drying and pyrolysis, the amorphous alumina layer obtained has a thickness ranging from 500 nm to 1 µm. The material is finally heat treated. Several treatment conditions were evaluated. A thermodynamic study of the Al-C-O-N system will be drawn, and the composition of the synthesized sol-gel and heat treatment parameters will be detailed. Then, the layer’s morphology and structure will be characterized thanks to Scanning Electron Microscopy and X-Ray Diffraction analyses. The impact of heat treatment parameters will be discussed and experimental results will be compared to the theoretical thermodynamic results.

scholarly journals Mechanism and processing dependence of biaxial texture development in magnesium oxide thin films grown by inclined-substrate deposition

2001 ◽  
Vol 11 (1) ◽  
pp. 3469-3472 ◽  
Author(s):  
M.P. Chudzik ◽  
R.E. Koritala ◽  
L.P. Luo ◽  
D.J. Miller ◽  
U. Balachandran ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnesium Oxide ◽  
Texture Development ◽  
Oxide Thin Films ◽  
Biaxial Texture

Structure of Aluminum-Nitride Layers Formed by Ion-Plasma Spraying

2013 ◽  
Vol 49 (3) ◽  
pp. 361-367
Author(s):  
Z. A. Duryahina ◽  
V. Ya. Pidkova
Keyword(s):  
Aluminum Nitride ◽  
Plasma Spraying ◽  
Ion Plasma ◽  
Nitride Layers

scholarly journals High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

2020 ◽  
Vol 14 (1) ◽  
Author(s):  
Alessandro Pitanti ◽  
Tapani Makkonen ◽  
Martin F. Colombano ◽  
Simone Zanotto ◽  
Leonardo Vicarelli ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
High Frequency ◽  
Mechanical Excitation ◽  
Nitride Layers
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