Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor deposition

A. Venkattraman; Alina A. Alexeenko

doi:10.1116/1.3592890

Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3592890 ◽

2011 ◽

Vol 29 (4) ◽

pp. 041509 ◽

Cited By ~ 3

Author(s):

A. Venkattraman ◽

Alina A. Alexeenko

Keyword(s):

Monte Carlo ◽

Electron Beam ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo

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Direct simulation Monte Carlo study of metal evaporation with collimator in e-beam physical vapor deposition

Chinese Physics B ◽

10.1088/1674-1056/28/7/074702 ◽

2019 ◽

Vol 28 (7) ◽

pp. 074702

Author(s):

Xiaoyong Lu ◽

Junjie Chai

Keyword(s):

Monte Carlo ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Metal Evaporation ◽

Simulation Monte Carlo

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Direct simulation monte carlo modeling of ionized metal physical vapor deposition for semiconductor processing

2009 IEEE International Conference on Plasma Science - Abstracts ◽

10.1109/plasma.2009.5227277 ◽

2009 ◽

Author(s):

Hao Deng ◽

Takashi Ozawa ◽

Deborah Levin ◽

Mark J. Kushner ◽

Larry Gochberg

Keyword(s):

Monte Carlo ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Semiconductor Processing ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Direct simulation Monte Carlo study of H/H2and H/H2/CO mixtures for diamond chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.363667 ◽

1996 ◽

Vol 80 (11) ◽

pp. 6474-6488 ◽

Cited By ~ 5

Author(s):

Robert S. Sinkovits ◽

C. Richard DeVore

Keyword(s):

Monte Carlo ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Chemical Vapor ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo ◽

Diamond Chemical Vapor Deposition

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Direct simulation Monte Carlo study of quantum effects on the spherical expansion of 4He

Physics of Fluids ◽

10.1063/1.870220 ◽

1999 ◽

Vol 11 (10) ◽

pp. 3174-3180 ◽

Cited By ~ 4

Author(s):

Katsuhisa Koura

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Quantum Effects ◽

Direct Simulation ◽

Spherical Expansion ◽

Simulation Monte Carlo

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Analysis of Transition Regime Flows in Low Pressure Chemical Vapor Deposition Reactors Using the Direct Simulation Monte Carlo Method

Journal of The Electrochemical Society ◽

10.1149/1.2221213 ◽

1992 ◽

Vol 139 (8) ◽

pp. 2264-2273 ◽

Cited By ~ 32

Author(s):

Daniel G. Coronell ◽

Klavs F. Jensen

Keyword(s):

Monte Carlo ◽

Chemical Vapor Deposition ◽

Monte Carlo Method ◽

Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Chemical Vapor ◽

Transition Regime ◽

Direct Simulation ◽

Pressure Chemical ◽

Simulation Monte Carlo

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Direct simulation Monte Carlo study of phonon heat conduction in solid nuclear fuels

10.32469/10355/36768 ◽

2012 ◽

Author(s):

Leroy Lee

Keyword(s):

Monte Carlo ◽

Heat Conduction ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Nuclear Fuels ◽

Simulation Monte Carlo

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An ab initio chemical reaction model for the direct simulation Monte Carlo study of non-equilibrium nitrogen flows

The Journal of Chemical Physics ◽

10.1063/1.4993307 ◽

2017 ◽

Vol 147 (8) ◽

pp. 084305 ◽

Cited By ~ 7

Author(s):

T. K. Mankodi ◽

U. V. Bhandarkar ◽

B. P. Puranik

Keyword(s):

Monte Carlo ◽

Ab Initio ◽

Chemical Reaction ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Reaction Model ◽

Direct Simulation ◽

Simulation Monte Carlo ◽

Chemical Reaction Model ◽

Nitrogen Flows

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Direct simulation Monte Carlo study of the formation and growth of clusters in the case of vapor expansion from a suddenly switched spherical source

Journal of Applied Mechanics and Technical Physics ◽

10.1007/s10808-009-0012-3 ◽

2009 ◽

Vol 50 (1) ◽

pp. 86-92 ◽

Cited By ~ 1

Author(s):

N. Yu. Bykov ◽

G. A. Lukyanov ◽

O. I. Simakova

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Spherical Source ◽

Simulation Monte Carlo

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A Direct Simulation Monte Carlo Study of Flow Considerations in Plasma Reactor Development for 300 mm Processing

Journal of The Electrochemical Society ◽

10.1149/1.1838126 ◽

1997 ◽

Vol 144 (11) ◽

pp. 3999-4004 ◽

Cited By ~ 7

Author(s):

D. Hash ◽

M. Meyyappan

Keyword(s):

Monte Carlo ◽

Plasma Reactor ◽

Direct Simulation Monte Carlo ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo

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A direct simulation Monte Carlo study of hypersonic leading-edge separation with rarefaction effects

Physics of Fluids ◽

10.1063/1.5030931 ◽

2018 ◽

Vol 30 (6) ◽

pp. 063602 ◽

Cited By ~ 11

Author(s):

R. Prakash ◽

S. Gai ◽

S. O’Byrne

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Leading Edge ◽

Monte Carlo Study ◽

Direct Simulation ◽

Simulation Monte Carlo ◽

Edge Separation ◽

Rarefaction Effects

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