Correlation of plasma characteristics to etch rate and via sidewall angle in a deep reactive ion etch system using Langmuir probe and optical emission spectroscopy

2011 ◽  
Vol 29 (1) ◽  
pp. 011008 ◽  
Author(s):  
S. P. Koirala ◽  
I. Awaah ◽  
S. L. Burkett ◽  
M. H. Gordon
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Etch Rate ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Characteristics ◽  
Sidewall Angle

scholarly journals Diagnostics of parameters by optical emission spectroscopy and Langmuir probe in a discharge of Ar/N2/CH4ternary mixture

2012 ◽  
Vol 370 ◽  
pp. 012047
Author(s):  
A Guerrero ◽  
L Salazar-Flores ◽  
C Torres-Segundo ◽  
H Martínez ◽  
P G Reyes ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission

LOW PRESSURE CH2Cl2 PLASMA DISCHARGE

2015 ◽  
Vol 8 (3) ◽  
pp. 2240-2248
Author(s):  
Osvaldo Flores
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Discharge ◽  
X Ray ◽  
Scanning Electron

Glow discharge of dichloromethane (DCM) was investigated employing Optical Emission Spectroscopy (OES), while the electron temperature and electron density were measured using a double Langmuir probe. Deposits formed were characterized by Scanning Electron Microscopy (SEM), X-ray Photo Fluorescence Spectroscopy (XPS) and Fourier Transform Infrared Spectroscopy (FTIR). The species identified by OES were the molecular bands of C2, C3, CH, H2, CH+, HCl+, Cl and C+. The material deposited displays a growing behavior. SEM observation shows several features which correspond to coalesce and growth mechanism. The characterization of the material deposited can explain the different stages of deposits that are formed on the electrode surface. Several factors are concerned in the complexity of the process, regarding the interaction of species formed during the plasma discharge. Involving several bonds types such as: C=C, C=C-CH2-Cl, C-C and CH.

Langmuir Probe and Optical Emission Spectroscopy Studies of Low-Pressure Gas Mixture of CO2and N2

2010 ◽  
Vol 12 (3) ◽  
pp. 314-319 ◽  
Author(s):  
E. F Mendez-Martinez ◽  
P. G Reyes ◽  
D Osorio-Gonzalez ◽  
F Castillo ◽  
H Martinez
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Low Pressure ◽  
Gas Mixture ◽  
Spectroscopy Studies
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