Electron energy distribution functions measured by Langmuir probe with optical emission spectroscopy in very high frequency capacitive discharge in nitrogen

2012 ◽  
Vol 19 (11) ◽  
pp. 113503 ◽  
Author(s):  
E. Abdel-Fattah ◽  
M. Bazavan ◽  
H. Sugai
Keyword(s):  
Energy Distribution ◽  
High Frequency ◽  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Distribution Functions ◽  
Very High Frequency ◽  
Energy Distribution Functions ◽  
Very High

Design of Automatic Matching System for Very High Frequency Plasma-Enhanced Processes

2006 ◽  
Vol 512 ◽  
pp. 239-242
Author(s):  
Yuji Yoshizako ◽  
Daisuke Matsuno
Keyword(s):  
High Frequency ◽  
Numerical Models ◽  
Distribution Functions ◽  
Very High Frequency ◽  
New Class ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Automatic Matching ◽  
Energy Distribution Functions ◽  
Very High

Since it can change electron energy distribution functions, very high frequency (VHF) plasma has gained significant attention as a promising new class of plasma. We demonstrate an automatic matching system for VHF plasma, that works in very wide ranges. A matching system was prepared using conventional variable capacitors. Reflection coefficient at the input of the matching circuits was measured with a directional coupler. A new calculation method for automatic matching based on numerical models for the circuit was developed, and the performance of the automatic matching system was evaluated using a load emulator. These results revealed that the system has an automatic matching capability for the entire range of the covering load area.

scholarly journals Diagnostics of parameters by optical emission spectroscopy and Langmuir probe in a discharge of Ar/N2/CH4ternary mixture

2012 ◽  
Vol 370 ◽  
pp. 012047
Author(s):  
A Guerrero ◽  
L Salazar-Flores ◽  
C Torres-Segundo ◽  
H Martínez ◽  
P G Reyes ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission
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