Thermal stability of GeSbTe thin films deposited by layer-by-layer metalorganic chemical vapor deposition

Jun-Ku Ahn; Kyoung-Woo Park; Nak-Jin Seong; Soon-Gil Yoon

doi:10.1116/1.3253472

Thermal stability of GeSbTe thin films deposited by layer-by-layer metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3253472 ◽

2009 ◽

Vol 27 (6) ◽

pp. L54 ◽

Cited By ~ 4

Author(s):

Jun-Ku Ahn ◽

Kyoung-Woo Park ◽

Nak-Jin Seong ◽

Soon-Gil Yoon

Keyword(s):

Thin Films ◽

Thermal Stability ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Layer By Layer ◽

Thermal Stability Of ◽

Metalorganic Chemical

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Thermal stability of electron traps in GaN grown by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.1814801 ◽

2004 ◽

Vol 85 (18) ◽

pp. 4058-4060 ◽

Cited By ~ 12

Author(s):

D. Johnstone ◽

S. Doğan ◽

J. Leach ◽

Y. T. Moon ◽

Y. Fu ◽

...

Keyword(s):

Thermal Stability ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Electron Traps ◽

Thermal Stability Of ◽

Metalorganic Chemical

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Annealing-Ambient-Dependent Thermal Stability of Ultrathin AlOxNy Films Grown by Metalorganic Chemical Vapor Deposition

Science of Advanced Materials ◽

10.1166/sam.2012.1394 ◽

2012 ◽

Vol 4 (10) ◽

pp. 1078-1084 ◽

Cited By ~ 2

Author(s):

Gang He ◽

Zhaoqi Sun ◽

Hanshuang Chen ◽

Zebo Fang ◽

Xiaoshuang Chen ◽

...

Keyword(s):

Thermal Stability ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Thermal Stability Of ◽

Metalorganic Chemical

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Influence of silicon nitride cap on the thermal stability of strained Al0.32Ga0.68As/In0.1Ga0.9As high mobility structures grown by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586044 ◽

1992 ◽

Vol 10 (6) ◽

pp. 2488 ◽

Cited By ~ 2

Author(s):

A. Kana’ah

Keyword(s):

Thermal Stability ◽

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

High Mobility ◽

Chemical Vapor ◽

Thermal Stability Of ◽

Metalorganic Chemical

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Effect of Substrates and Thermal Treatments on Metalorganic Chemical Vapor Deposition-Grown Sb2Te3 Thin Films

Crystal Growth & Design ◽

10.1021/acs.cgd.1c00508 ◽

2021 ◽

Author(s):

Martino Rimoldi ◽

Raimondo Cecchini ◽

Claudia Wiemer ◽

Emanuele Longo ◽

Stefano Cecchi ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Thermal Treatments ◽

Metalorganic Chemical

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Fabrication of aluminum oxide thin films by a low‐pressure metalorganic chemical vapor deposition technique

Applied Physics Letters ◽

10.1063/1.108838 ◽

1993 ◽

Vol 62 (7) ◽

pp. 681-683 ◽

Cited By ~ 34

Author(s):

J. S. Kim ◽

H. A. Marzouk ◽

P. J. Reucroft ◽

J. D. Robertson ◽

C. E. Hamrin

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Aluminum Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Metalorganic Chemical

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Low-pressure Metalorganic Chemical Vapor Deposition and Characterization of YBa2Cu3O7−x Thin Films

Superconductivity and Applications ◽

10.1007/978-1-4684-7565-4_11 ◽

1990 ◽

pp. 127-138

Author(s):

P. Zawadzki ◽

G. S. Tompa ◽

P. Norris ◽

D. W. Noh ◽

B. Gallois ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Metalorganic Chemical

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Epitaxial thin films of YBa2Cu3O7−xon LaAlO3substrates deposited by plasma‐enhanced metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.104973 ◽

1991 ◽

Vol 58 (2) ◽

pp. 185-187 ◽

Cited By ~ 36

Author(s):

C. S. Chern ◽

J. Zhao ◽

Y. Q. Li ◽

P. Norris ◽

B. Kear ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Thin Films ◽

Metalorganic Chemical

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Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films

Journal of Applied Physics ◽

10.1063/1.373005 ◽

2000 ◽

Vol 87 (10) ◽

pp. 7430-7437 ◽

Cited By ~ 13

Author(s):

Y. Gao ◽

C. L. Perkins ◽

S. He ◽

P. Alluri ◽

T. Tran ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Mechanistic Study ◽

Metalorganic Chemical

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Microstructure and Optical Properties of Al[sub x]Ga[sub 1−x]N∕GaN Heterostructure Thin Films Grown on Si(111) Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906048 ◽

2008 ◽

Author(s):

H. Sutanto ◽

A. Subagio ◽

E. Supriyanto ◽

P. Arifin ◽

M. Budiman ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Gan Heterostructure ◽

Metalorganic Chemical

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(001) textured PbTiO3 thin films grown on redopingn-Si by metalorganic chemical vapor deposition under reduced pressure

Applied Physics A ◽

10.1007/bf01567330 ◽

1996 ◽

Vol 63 (4) ◽

pp. 381-384 ◽

Cited By ~ 3

Author(s):

L. Sun ◽

Y. -F. Chen ◽

T. Yu ◽

N. -B. Ming ◽

D. -S. Ding ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Reduced Pressure ◽

Metalorganic Chemical

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