Transparent conducting Si-codoped Al-doped ZnO thin films prepared by magnetron sputtering using Al-doped ZnO powder targets containing SiC

2009 ◽  
Vol 27 (4) ◽  
pp. 1001-1005 ◽  
Author(s):  
Jun-ichi Nomoto ◽  
Toshihiro Miyata ◽  
Tadatsugu Minami
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Doped Zno ◽  
Zno Powder

Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

2008 ◽  
Vol 254 (8) ◽  
pp. 2250-2254 ◽  
Author(s):  
Young Ran Park ◽  
Eung Kwon Kim ◽  
Donggeun Jung ◽  
Tae Seok Park ◽  
Young Sung Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Zno Thin Films ◽  
Dc Magnetron Sputtering ◽  
Transparent Conducting ◽  
Pulsed Dc ◽  
Doped Zno ◽  
Pulsed Dc Magnetron Sputtering

Substrate Temperature Dependence of Transparent Conducting Al-Doped ZnO Thin Films Prepared by Magnetron Sputtering

1992 ◽  
Vol 31 (Part 2, No. 3A) ◽  
pp. L257-L260 ◽  
Author(s):  
Tadatsugu Minami ◽  
Hirotoshi Sato ◽  
Hideyuki Imamoto ◽  
Shinzo Takata
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Temperature Dependence ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Doped Zno
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