Transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering with dc and rf powers applied in combination

Tadatsugu Minami; Yuusuke Ohtani; Toshihiro Miyata; Takeshi Kuboi

doi:10.1116/1.2748809

Transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering with dc and rf powers applied in combination

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2748809 ◽

2007 ◽

Vol 25 (4) ◽

pp. 1172-1177 ◽

Cited By ~ 29

Author(s):

Tadatsugu Minami ◽

Yuusuke Ohtani ◽

Toshihiro Miyata ◽

Takeshi Kuboi

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Transparent Conducting ◽

Doped Zno

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Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2009.09.174 ◽

2010 ◽

Vol 518 (11) ◽

pp. 2984-2987 ◽

Cited By ~ 36

Author(s):

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Doped Zno

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Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2007.09.008 ◽

2008 ◽

Vol 254 (8) ◽

pp. 2250-2254 ◽

Cited By ~ 30

Author(s):

Young Ran Park ◽

Eung Kwon Kim ◽

Donggeun Jung ◽

Tae Seok Park ◽

Young Sung Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Effect of inserting a buffer layer on the characteristics of transparent conducting impurity-doped ZnO thin films prepared by dc magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.093 ◽

2010 ◽

Vol 519 (5) ◽

pp. 1587-1593 ◽

Cited By ~ 31

Author(s):

Jun-ichi Nomoto ◽

Jun-ichi Oda ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Substrate Temperature Dependence of Transparent Conducting Al-Doped ZnO Thin Films Prepared by Magnetron Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.l257 ◽

1992 ◽

Vol 31 (Part 2, No. 3A) ◽

pp. L257-L260 ◽

Cited By ~ 95

Author(s):

Tadatsugu Minami ◽

Hirotoshi Sato ◽

Hideyuki Imamoto ◽

Shinzo Takata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Temperature Dependence ◽

Zno Thin Films ◽

Transparent Conducting ◽

Doped Zno

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Reduction of obtainable resistivity in transparent conducting impurity-doped ZnO thin films prepared with a very thin buffer layer by magnetron sputtering

10.1117/12.903173 ◽

2011 ◽

Author(s):

Tadatsugu Minami ◽

Toshihiro Miyata ◽

Tomoyasu Hirano ◽

Jun-ichi Nomoto

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Zno Thin Films ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.007 ◽

2010 ◽

Vol 519 (1) ◽

pp. 385-390 ◽

Cited By ~ 38

Author(s):

Tadatsugu Minami ◽

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Transparent conducting Si-codoped Al-doped ZnO thin films prepared by magnetron sputtering using Al-doped ZnO powder targets containing SiC

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3153284 ◽

2009 ◽

Vol 27 (4) ◽

pp. 1001-1005 ◽

Cited By ~ 11

Author(s):

Jun-ichi Nomoto ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Transparent Conducting ◽

Doped Zno ◽

Zno Powder

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Spatial resistivity distribution of transparent conducting impurity-doped ZnO thin films deposited on substrates by dc magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3357284 ◽

2010 ◽

Vol 28 (4) ◽

pp. 842-845 ◽

Cited By ~ 6

Author(s):

Tadatsugu Minami ◽

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2016.02.161 ◽

2016 ◽

Vol 370 ◽

pp. 83-91 ◽

Cited By ~ 74

Author(s):

Fang-Hsing Wang ◽

Chiao-Lu Chang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Transparent Conducting ◽

Doped Zno ◽

Co Doped

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Structural and electrical properties of transparent conducting Al2O3-doped ZnO thin films using off-axis DC magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2012.06.094 ◽

2012 ◽

Vol 85 ◽

pp. 88-90 ◽

Cited By ~ 15

Author(s):

Sunghwan Lee ◽

Seung-Hyun Kim ◽

Youngha Kim ◽

Angus I. Kingon ◽

David C. Paine ◽

...

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Structural And Electrical Properties ◽

Doped Zno

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