Spatial resistivity distribution of transparent conducting impurity-doped ZnO thin films deposited on substrates by dc magnetron sputtering

Tadatsugu Minami; Jun-ichi Oda; Jun-ichi Nomoto; Toshihiro Miyata

doi:10.1116/1.3357284

Spatial resistivity distribution of transparent conducting impurity-doped ZnO thin films deposited on substrates by dc magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3357284 ◽

2010 ◽

Vol 28 (4) ◽

pp. 842-845 ◽

Cited By ~ 6

Author(s):

Tadatsugu Minami ◽

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Effect of inserting a buffer layer on the characteristics of transparent conducting impurity-doped ZnO thin films prepared by dc magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.093 ◽

2010 ◽

Vol 519 (5) ◽

pp. 1587-1593 ◽

Cited By ~ 31

Author(s):

Jun-ichi Nomoto ◽

Jun-ichi Oda ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.08.007 ◽

2010 ◽

Vol 519 (1) ◽

pp. 385-390 ◽

Cited By ~ 38

Author(s):

Tadatsugu Minami ◽

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Improvements of spatial resistivity distribution in transparent conducting Al-doped ZnO thin films deposited by DC magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2009.09.174 ◽

2010 ◽

Vol 518 (11) ◽

pp. 2984-2987 ◽

Cited By ~ 36

Author(s):

Jun-ichi Oda ◽

Jun-ichi Nomoto ◽

Toshihiro Miyata ◽

Tadatsugu Minami

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Doped Zno

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Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2007.09.008 ◽

2008 ◽

Vol 254 (8) ◽

pp. 2250-2254 ◽

Cited By ~ 30

Author(s):

Young Ran Park ◽

Eung Kwon Kim ◽

Donggeun Jung ◽

Tae Seok Park ◽

Young Sung Kim

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Reduction of obtainable resistivity in transparent conducting impurity-doped ZnO thin films prepared with a very thin buffer layer by magnetron sputtering

10.1117/12.903173 ◽

2011 ◽

Author(s):

Tadatsugu Minami ◽

Toshihiro Miyata ◽

Tomoyasu Hirano ◽

Jun-ichi Nomoto

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Zno Thin Films ◽

Transparent Conducting ◽

Impurity Doped ◽

Doped Zno

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Structural and electrical properties of transparent conducting Al2O3-doped ZnO thin films using off-axis DC magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2012.06.094 ◽

2012 ◽

Vol 85 ◽

pp. 88-90 ◽

Cited By ~ 15

Author(s):

Sunghwan Lee ◽

Seung-Hyun Kim ◽

Youngha Kim ◽

Angus I. Kingon ◽

David C. Paine ◽

...

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Transparent Conducting ◽

Structural And Electrical Properties ◽

Doped Zno

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Preparing transparent cobalt-doped ZnO thin films by DC magnetron sputtering

Materials Today Proceedings ◽

10.1016/j.matpr.2017.06.132 ◽

2017 ◽

Vol 4 (5) ◽

pp. 6311-6316 ◽

Cited By ~ 1

Author(s):

Pongladda Panyajirawut ◽

Nattha Pratumsuwan ◽

Kornkamon Meesombad ◽

Kridsana Thanawattana ◽

Artit Chingsungnoen ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering

Optics Communications ◽

10.1016/j.optcom.2008.10.003 ◽

2009 ◽

Vol 282 (2) ◽

pp. 247-252 ◽

Cited By ~ 152

Author(s):

Xue-Yong Li ◽

Hong-Jian Li ◽

Zhi-Jun Wang ◽

Hui Xia ◽

Zhi-Yong Xiong ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Structural And Optical Properties ◽

Doped Zno

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Effect of buffer thickness on the properties of Al-doped ZnO thin films prepared by DC magnetron sputtering

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-017-6415-7 ◽

2017 ◽

Vol 28 (10) ◽

pp. 7302-7306 ◽

Cited By ~ 4

Author(s):

Ke Zhu ◽

Haibin Wang ◽

Faxin Xiao ◽

Feng Xu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Low resistivity of Ni–Al co-doped ZnO thin films deposited by DC magnetron sputtering at low sputtering power

Applied Surface Science ◽

10.1016/j.apsusc.2013.12.071 ◽

2014 ◽

Vol 293 ◽

pp. 55-61 ◽

Cited By ~ 23

Author(s):

JongWoo Lee ◽

K.N. Hui ◽

K.S. Hui ◽

Y.R. Cho ◽

Ho-Hwan Chun

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Zno Thin Films ◽

Dc Magnetron Sputtering ◽

Low Resistivity ◽

Sputtering Power ◽

Doped Zno ◽

Co Doped

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