Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry

2009 ◽  
Vol 27 (4) ◽  
pp. 813-817 ◽  
Author(s):  
Masanori Shinohara ◽  
Ken Cho ◽  
Yoshinobu Matsuda ◽  
Takanori Inayoshi ◽  
Hiroki Kawazoe ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Substrate Temperature ◽  
Amorphous Carbon ◽  
Temperature Effects ◽  
Film Growth ◽  
Carbon Film ◽  
Internal Reflection ◽  
Amorphous Carbon Film ◽  
Reflection Geometry

Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy

2008 ◽  
Vol 516 (13) ◽  
pp. 4379-4383 ◽  
Author(s):  
Masanori Shinohara ◽  
Ken Cho ◽  
Hiromichi Shibata ◽  
Keishi Okamoto ◽  
Tatsuyuki Nakatani ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Hydrogen Plasma ◽  
Carbon Film ◽  
Amorphous Carbon Film ◽  
Hydrogenated Amorphous Carbon ◽  
Hydrogenated Amorphous

Stress and interfacial defects induced by amorphous carbon film growth on silicon

2005 ◽  
Vol 14 (3-7) ◽  
pp. 1036-1040 ◽  
Author(s):  
C. Macchi ◽  
S. Mariazzi ◽  
A. Zecca ◽  
G.P. Karwasz ◽  
R.S. Brusa ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Film Growth ◽  
Carbon Film ◽  
Amorphous Carbon Film ◽  
Interfacial Defects

Effects of substrate temperature on physical properties of amorphous carbon film synthesized under atmospheric pressure

2010 ◽  
Vol 205 ◽  
pp. S414-S417 ◽  
Author(s):  
Takayuki Sakata ◽  
Hideyuki Kodama ◽  
Hidetaka Hayashi ◽  
Toshihisa Shimo ◽  
Tetsuya Suzuki
Keyword(s):  
Substrate Temperature ◽  
Physical Properties ◽  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Film ◽  
Amorphous Carbon Film

Amorphous carbon film growth on Si: Correlation between stress and generation of defects into the substrate

2005 ◽  
Vol 86 (22) ◽  
pp. 221906 ◽  
Author(s):  
R. S. Brusa ◽  
C. Macchi ◽  
S. Mariazzi ◽  
G. P. Karwasz ◽  
N. Laidani ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Film Growth ◽  
Carbon Film ◽  
Amorphous Carbon Film

scholarly journals Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

2010 ◽  
Vol 35 (3) ◽  
pp. 563-566 ◽  
Author(s):  
Masanori Shinohara ◽  
Hiroki Kawazoe ◽  
Taka-aki Kawakami ◽  
Takanori Inayoshi ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Film Deposition ◽  
Substrate Bias ◽  
Amorphous Carbon Film

scholarly journals Infrared Spectroscopy of Amorphous Carbon Film Deposition Process using Acetylene Plasma

Hyomen Kagaku ◽  
2010 ◽  
Vol 31 (8) ◽  
pp. 400-404
Author(s):  
Masanori SHINOHARA ◽  
Hiroki KAWAZOE ◽  
Takanori INAYOSHI ◽  
Taka-aki KAWAKAMI ◽  
Kojiro HARA ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Film Deposition ◽  
Amorphous Carbon Film

Observation of Atom Rows in Thorium Pyromellitate Using a Field Emission STEM

1977 ◽  
Vol 35 ◽  
pp. 80-81
Author(s):  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda
Keyword(s):  
Field Emission ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Dark Field Image ◽  
Dark Field ◽  
Amorphous Carbon Film ◽  
Atomic Size ◽  
Wide Range ◽  
A Chain

It is interesting to observe polymers at atomic size resolution. Some works have been reported for thorium pyromellitate by using a STEM (1), or a CTEM (2,3). The results showed that this polymer forms a chain in which thorium atoms are arranged. However, the distance between adjacent thorium atoms varies over a wide range (0.4-1.3nm) according to the different authors.The present authors have also observed thorium pyromellitate specimens by means of a field emission STEM, described in reference 4. The specimen was prepared by placing a drop of thorium pyromellitate in 10-3 CH3OH solution onto an amorphous carbon film about 2nm thick. The dark field image is shown in Fig. 1A. Thorium atoms are clearly observed as regular atom rows having a spacing of 0.85nm. This lattice gradually deteriorated by successive observations. The image changed to granular structures, as shown in Fig. 1B, which was taken after four scanning frames.

Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction

2018 ◽  
Vol 138 (11) ◽  
pp. 538-543
Author(s):  
Masanori Shinohara ◽  
Taisuke Tominaga ◽  
Hayato Shimomura ◽  
Takeshi Ihara ◽  
Yoshihito Yagyu ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Amorphous Carbon Film
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