Amorphous carbon film growth on Si: Correlation between stress and generation of defects into the substrate

2005 ◽  
Vol 86 (22) ◽  
pp. 221906 ◽  
Author(s):  
R. S. Brusa ◽  
C. Macchi ◽  
S. Mariazzi ◽  
G. P. Karwasz ◽  
N. Laidani ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Film Growth ◽  
Carbon Film ◽  
Amorphous Carbon Film

Stress and interfacial defects induced by amorphous carbon film growth on silicon

2005 ◽  
Vol 14 (3-7) ◽  
pp. 1036-1040 ◽  
Author(s):  
C. Macchi ◽  
S. Mariazzi ◽  
A. Zecca ◽  
G.P. Karwasz ◽  
R.S. Brusa ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Film Growth ◽  
Carbon Film ◽  
Amorphous Carbon Film ◽  
Interfacial Defects

Observation of Atom Rows in Thorium Pyromellitate Using a Field Emission STEM

1977 ◽  
Vol 35 ◽  
pp. 80-81
Author(s):  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda
Keyword(s):  
Field Emission ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Dark Field Image ◽  
Dark Field ◽  
Amorphous Carbon Film ◽  
Atomic Size ◽  
Wide Range ◽  
A Chain

It is interesting to observe polymers at atomic size resolution. Some works have been reported for thorium pyromellitate by using a STEM (1), or a CTEM (2,3). The results showed that this polymer forms a chain in which thorium atoms are arranged. However, the distance between adjacent thorium atoms varies over a wide range (0.4-1.3nm) according to the different authors.The present authors have also observed thorium pyromellitate specimens by means of a field emission STEM, described in reference 4. The specimen was prepared by placing a drop of thorium pyromellitate in 10-3 CH3OH solution onto an amorphous carbon film about 2nm thick. The dark field image is shown in Fig. 1A. Thorium atoms are clearly observed as regular atom rows having a spacing of 0.85nm. This lattice gradually deteriorated by successive observations. The image changed to granular structures, as shown in Fig. 1B, which was taken after four scanning frames.

Deposition of Hydrophilic Amorphous Carbon Film with Ether as a Source Molecule and Analysis of its Deposition Reaction

2018 ◽  
Vol 138 (11) ◽  
pp. 538-543
Author(s):  
Masanori Shinohara ◽  
Taisuke Tominaga ◽  
Hayato Shimomura ◽  
Takeshi Ihara ◽  
Yoshihito Yagyu ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Amorphous Carbon Film

Effect of gas pressure on current-voltage characteristics of amorphous carbon film/silicon heterojunction

2007 ◽  
Vol 91 (9) ◽  
pp. 092104 ◽  
Author(s):  
Xili Gao ◽  
Qingzhong Xue ◽  
Lanzhong Hao ◽  
Qun Li ◽  
Qingbin Zheng ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Gas Pressure ◽  
Amorphous Carbon Film ◽  
Current Voltage ◽  
Current Voltage Characteristics
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