scholarly journals Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

2010 ◽  
Vol 35 (3) ◽  
pp. 563-566 ◽  
Author(s):  
Masanori Shinohara ◽  
Hiroki Kawazoe ◽  
Taka-aki Kawakami ◽  
Takanori Inayoshi ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Film Deposition ◽  
Substrate Bias ◽  
Amorphous Carbon Film

scholarly journals Infrared Spectroscopy of Amorphous Carbon Film Deposition Process using Acetylene Plasma

Hyomen Kagaku ◽  
2010 ◽  
Vol 31 (8) ◽  
pp. 400-404
Author(s):  
Masanori SHINOHARA ◽  
Hiroki KAWAZOE ◽  
Takanori INAYOSHI ◽  
Taka-aki KAWAKAMI ◽  
Kojiro HARA ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Film Deposition ◽  
Amorphous Carbon Film

Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy

2008 ◽  
Vol 516 (13) ◽  
pp. 4379-4383 ◽  
Author(s):  
Masanori Shinohara ◽  
Ken Cho ◽  
Hiromichi Shibata ◽  
Keishi Okamoto ◽  
Tatsuyuki Nakatani ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Amorphous Carbon ◽  
Hydrogen Plasma ◽  
Carbon Film ◽  
Amorphous Carbon Film ◽  
Hydrogenated Amorphous Carbon ◽  
Hydrogenated Amorphous

Difference of deposition process of an amorphous carbon film due to source gases

2010 ◽  
Vol 518 (13) ◽  
pp. 3497-3501 ◽  
Author(s):  
Masanori Shinohara ◽  
Hiroki Kawazoe ◽  
Takanori Inayoshi ◽  
Taka-aki Kawakami ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Amorphous Carbon Film

IR Absorption Spectroscopy of Deposition Process of Amorphous Carbon Film due to Ethylene Plasma

2018 ◽  
Vol 138 (11) ◽  
pp. 544-550
Author(s):  
Masanori Shinohara ◽  
Taisuke Tominaga ◽  
Hayato Shimomura ◽  
Takeshi Ihara ◽  
Yoshihito Yagyu ◽  
...  
Keyword(s):  
Absorption Spectroscopy ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Deposition Process ◽  
Ir Absorption ◽  
Amorphous Carbon Film

scholarly journals Plasma Generation in Organic Solvent for Amorphous Carbon Film Deposition

2010 ◽  
Vol 35 (3) ◽  
pp. 567-570 ◽  
Author(s):  
Masanori Shinohara ◽  
Shuai Zhang ◽  
Kenji Kotani ◽  
Kazuhiko Akaki ◽  
Yoshinobu Matsuda ◽  
...  
Keyword(s):  
Organic Solvent ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
Film Deposition ◽  
Amorphous Carbon Film ◽  
Plasma Generation
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