High rate sputtering deposition of silicon oxide thin films from new SiO2:Si target composition

2009 ◽  
Vol 27 (4) ◽  
pp. 979-985
Author(s):  
Qi Hua Fan ◽  
Li Qin Zhou ◽  
David Stevenson
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
High Rate ◽  
Oxide Thin Films ◽  
Sputtering Deposition ◽  
Target Composition

Facile Fabrication Procedure for C60-Doped Silicon Oxide Thin Films

1997 ◽  
Vol 26 (10) ◽  
pp. 995-996 ◽  
Author(s):  
Isao Hasegawa ◽  
Koji Shibusa ◽  
Satoshi Kobayashi ◽  
Shuichi Nonomura ◽  
Shoji Nitta
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films ◽  
Doped Silicon ◽  
Fabrication Procedure ◽  
Facile Fabrication

IR ellipsometry investigations of N2O-nitrided silicon oxide thin films on silicon

1993 ◽  
Vol 234 (1-2) ◽  
pp. 337-341 ◽  
Author(s):  
M. Weidner ◽  
A. Röseler ◽  
M. Eichler
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films

ChemInform Abstract: First Observation of Strained Siloxane Bonds on Silicon Oxide Thin Films.

ChemInform ◽  
2010 ◽  
Vol 24 (41) ◽  
pp. no-no
Author(s):  
C.-M. CHIANG ◽  
B. R. ZEGARSKI ◽  
L. H. DUBOIS
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films

Indium silicon oxide thin films for infrared metaphotonics

2019 ◽  
Vol 114 (16) ◽  
pp. 161105 ◽  
Author(s):  
W. A. Britton ◽  
R. Zhang ◽  
S. Shrestha ◽  
Y. Chen ◽  
N. Yu ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films
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