Dynamical study of ion-beam oxidation: Incorporation of hyperthermal oxygen ions into silicon oxide thin films

2003 ◽  
Vol 67 (7) ◽  
Author(s):  
T. Tzvetkov ◽  
X. Qin ◽  
D. C. Jacobs
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Ion Beam ◽  
Oxide Thin Films ◽  
Dynamical Study ◽  
Oxygen Ions

Ion beam analysis of PECVD silicon oxide thin films

2006 ◽  
Vol 243 (1) ◽  
pp. 200-204 ◽  
Author(s):  
F. Fernandez-Lima ◽  
J.A. Rodriguez ◽  
E. Pedrero ◽  
H.D. Fonseca Filho ◽  
A. Llovera ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Ion Beam ◽  
Oxide Thin Films ◽  
Ion Beam Analysis ◽  
Beam Analysis

Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Ion Beam ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Ion Beam Assisted Deposition ◽  
P Type

Facile Fabrication Procedure for C60-Doped Silicon Oxide Thin Films

1997 ◽  
Vol 26 (10) ◽  
pp. 995-996 ◽  
Author(s):  
Isao Hasegawa ◽  
Koji Shibusa ◽  
Satoshi Kobayashi ◽  
Shuichi Nonomura ◽  
Shoji Nitta
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films ◽  
Doped Silicon ◽  
Fabrication Procedure ◽  
Facile Fabrication

IR ellipsometry investigations of N2O-nitrided silicon oxide thin films on silicon

1993 ◽  
Vol 234 (1-2) ◽  
pp. 337-341 ◽  
Author(s):  
M. Weidner ◽  
A. Röseler ◽  
M. Eichler
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films

ChemInform Abstract: First Observation of Strained Siloxane Bonds on Silicon Oxide Thin Films.

ChemInform ◽  
2010 ◽  
Vol 24 (41) ◽  
pp. no-no
Author(s):  
C.-M. CHIANG ◽  
B. R. ZEGARSKI ◽  
L. H. DUBOIS
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films

Indium silicon oxide thin films for infrared metaphotonics

2019 ◽  
Vol 114 (16) ◽  
pp. 161105 ◽  
Author(s):  
W. A. Britton ◽  
R. Zhang ◽  
S. Shrestha ◽  
Y. Chen ◽  
N. Yu ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Oxide Thin Films
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