Growth modes in metal-organic molecular beam epitaxy of TiO2 on r-plane sapphire

Bharat Jalan; Roman Engel-Herbert; Joël Cagnon; Susanne Stemmer

doi:10.1116/1.3065713

Growth modes in metal-organic molecular beam epitaxy of TiO2 on r-plane sapphire

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3065713 ◽

2009 ◽

Vol 27 (2) ◽

pp. 230-233 ◽

Cited By ~ 25

Author(s):

Bharat Jalan ◽

Roman Engel-Herbert ◽

Joël Cagnon ◽

Susanne Stemmer

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Growth Modes ◽

Metal Organic

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Formation of misfit and threading dislocations in molecular-beam epitaxy grown strained layer epitaxy: Role of growth modes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583705 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1167 ◽

Cited By ~ 2

Author(s):

Jasprit Singh

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Threading Dislocations ◽

Strained Layer ◽

Growth Modes

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Low-Angle-Incidence Microchannel Epitaxy of $a$-Plane GaN Grown by Ammonia-Based Metal–Organic Molecular Beam Epitaxy

Applied Physics Express ◽

10.1143/apex.5.045501 ◽

2012 ◽

Vol 5 (4) ◽

pp. 045501 ◽

Cited By ~ 4

Author(s):

Chia-Hung Lin ◽

Shota Uchiyama ◽

Takahiro Maruyama ◽

Shigeya Naritsuka

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Metal Organic

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Deposition of oxide films by metal-organic molecular-beam epitaxy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585063 ◽

1990 ◽

Vol 8 (2) ◽

pp. 327 ◽

Cited By ~ 15

Author(s):

J. P. Bade

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Oxide Films ◽

Metal Organic

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Low angle incidence microchannel epitaxy of GaN grown by ammonia-based metal–organic molecular beam epitaxy

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2010.10.051 ◽

2011 ◽

Vol 318 (1) ◽

pp. 446-449 ◽

Cited By ~ 5

Author(s):

Chia-Hung Lin ◽

Ryota Abe ◽

Takahiro Maruyama ◽

Shigeya Naritsuka

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Metal Organic

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Initial growth modes of InP layer grown by molecular beam epitaxy and migration enhanced epitaxy on Si films grown on InP (100) substrates

Journal of Crystal Growth ◽

10.1016/0022-0248(94)90024-8 ◽

1994 ◽

Vol 139 (1-2) ◽

pp. 19-26

Author(s):

Hiroyuki Maruyama ◽

Kangsa Pak ◽

Hiroo Yonezu

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Initial Growth ◽

Growth Modes ◽

Migration Enhanced Epitaxy ◽

And Migration ◽

Si Films

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Extenuation of Stress and Defects in GaN Films Grown on a Metal–Organic Chemical Vapor Deposition-GaN/c-Sapphire Substrate by Plasma-Assisted Molecular Beam Epitaxy

Crystal Growth & Design ◽

10.1021/acs.cgd.5b00125 ◽

2015 ◽

Vol 15 (5) ◽

pp. 2144-2150 ◽

Cited By ~ 30

Author(s):

Neha Aggarwal ◽

Shibin T. C. Krishna ◽

Lalit Goswami ◽

Monu Mishra ◽

Govind Gupta ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Molecular Beam Epitaxy ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Molecular Beam ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Growth modes in atomic hydrogen‐assisted molecular beam epitaxy of GaAs

Applied Physics Letters ◽

10.1063/1.115200 ◽

1995 ◽

Vol 67 (5) ◽

pp. 676-678 ◽

Cited By ~ 44

Author(s):

Yoshitaka Okada ◽

Tomoya Fujita ◽

Mitsuo Kawabe

Keyword(s):

Molecular Beam Epitaxy ◽

Atomic Hydrogen ◽

Molecular Beam ◽

Growth Modes

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Metal-organic molecular beam epitaxy growth and properties of widegap II–VI compounds

Widegap II–VI Compounds for Opto-electronic Applications ◽

10.1007/978-1-4615-3486-0_5 ◽

1992 ◽

pp. 98-123 ◽

Cited By ~ 1

Author(s):

A. Yoshikawa

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Molecular Beam Epitaxy Growth ◽

Metal Organic

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Characterization and process effects of HfO2 thin films grown by metal-organic molecular beam epitaxy

Materials Science and Engineering B ◽

10.1016/j.mseb.2005.06.012 ◽

2005 ◽

Vol 123 (1) ◽

pp. 20-30 ◽

Cited By ~ 37

Author(s):

Myoung-Seok Kim ◽

Young-Don Ko ◽

Minseong Yun ◽

Jang-Hyuk Hong ◽

Min-Chang Jeong ◽

...

Keyword(s):

Thin Films ◽

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Process Effects ◽

Metal Organic

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Nanoscale growth of a Sn-guided SiGeSn alloy on Si (111) substrates by molecular beam epitaxy

Nanoscale Advances ◽

10.1039/d0na00680g ◽

2021 ◽

Author(s):

Liming Wang ◽

Yichi Zhang ◽

Hao Sun ◽

Jie You ◽

Yuanhao Miao ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Vertical Growth ◽

Growth Modes

Lateral and vertical growth modes of defect-free SiGeSn nanostructures are observed and systematically investigated both experimentally and theoretically.

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