Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry
2011 ◽
Vol 305
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pp. 144-148
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Keyword(s):
2017 ◽
Vol 32
(3)
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pp. 290-297
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Keyword(s):
Keyword(s):
1965 ◽
Vol 38
(4)
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pp. 769-781
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Keyword(s):
2019 ◽
Vol 6
(21)
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pp. 3693-3697
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Keyword(s):