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Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
◽
10.1116/1.2789447
◽
2007
◽
Vol 25
(6)
◽
pp. 2004
◽
Cited By ~ 64
Author(s):
Yan Feng
◽
Michael Feser
◽
Alan Lyon
◽
Steve Rishton
◽
Xianghui Zeng
◽
...
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
Zone Plates
◽
X Ray Imaging
Download Full-text
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References
Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography
10.1117/12.451019
◽
2002
◽
Cited By ~ 9
Author(s):
Ralu Divan
◽
Derrick C. Mancini
◽
Nicolai A. Moldovan
◽
Barry P. Lai
◽
Lahsen Assoufid
◽
...
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
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High-resolution X-ray imaging using a high aspect ratio SU-8 microstructure
Opto-Canada: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging
◽
10.1117/12.2283937
◽
2017
◽
Author(s):
Ye Zhou
Keyword(s):
High Resolution
◽
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
X Ray Imaging
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Fabrication and focusing test of hard X-ray zone plates with high aspect ratio
Optics and Precision Engineering
◽
10.3788/ope.20172511.2803
◽
2017
◽
Vol 25
(11)
◽
pp. 2803-2809
Author(s):
李海亮 LI Hai-liang
◽
史丽娜 SHI Li-na
◽
牛洁斌 NIU Jie-bin
◽
王冠亚 WANG Guan-ya
◽
谢常青 XIE Chang-qing
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
Zone Plates
Download Full-text
Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
◽
10.1116/1.4991794
◽
2017
◽
Vol 35
(6)
◽
pp. 06G901
◽
Cited By ~ 10
Author(s):
Kenan Li
◽
Michael J. Wojcik
◽
Ralu Divan
◽
Leonidas E. Ocola
◽
Bing Shi
◽
...
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
Chemical Etching
◽
X Ray
◽
Zone Plates
◽
Metal Assisted Chemical Etching
Download Full-text
Fabrication of high aspect ratio gratings for X-ray imaging
Optoelectronics Letters
◽
10.1007/s11801-014-3220-x
◽
2014
◽
Vol 10
(2)
◽
pp. 88-90
◽
Cited By ~ 4
Author(s):
Shuang-yue Hou
◽
Ying Xiong
◽
Shan Chen
◽
Peng-hui Xiong
◽
Xiang-yu Chen
◽
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Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
X Ray Imaging
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Numerical simulation of x-ray zone plates with high aspect ratio
10.1063/1.47920
◽
1995
◽
Author(s):
Yuri V. Kopylov
◽
Alexei V. Popov
◽
Alexander V. Vinogradov
Keyword(s):
Numerical Simulation
◽
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
Zone Plates
Download Full-text
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
Microsystem Technologies
◽
10.1007/s00542-007-0542-7
◽
2008
◽
Vol 14
(9-11)
◽
pp. 1251-1255
◽
Cited By ~ 9
Author(s):
Longhua Liu
◽
Gang Liu
◽
Ying Xiong
◽
Jie Chen
◽
Chunlei Kang
◽
...
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
Fresnel Zone
◽
Fresnel Zone Plates
◽
X Ray
◽
Zone Plates
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Fabrication of high-aspect-ratio hard x-ray zone plates with HSQ plating molds
10.1117/12.796839
◽
2008
◽
Cited By ~ 2
Author(s):
Ming Lu
◽
Leonidas E. Ocola
◽
Ralu Divan
◽
Derrick C. Mancini
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
Zone Plates
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New hybrid (e‐beam/x‐ray) exposure technique for high aspect ratio microstructure fabrication
Journal of Vacuum Science and Technology
◽
10.1116/1.570259
◽
1979
◽
Vol 16
(6)
◽
pp. 1631-1634
◽
Cited By ~ 14
Author(s):
M. Hatzakis
◽
D. Hofer
◽
T. H. P. Chang
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
X Ray
◽
Microstructure Fabrication
◽
High Aspect Ratio Microstructure
◽
Exposure Technique
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Fabrication of high aspect ratio nanoscale periodic structures by the soft X-ray interference lithography
Microelectronic Engineering
◽
10.1016/j.mee.2016.12.028
◽
2017
◽
Vol 170
◽
pp. 49-53
◽
Cited By ~ 10
Author(s):
Jun Zhao
◽
Yanqing Wu
◽
Chaofan Xue
◽
Shumin Yang
◽
Liansheng Wang
◽
...
Keyword(s):
Aspect Ratio
◽
High Aspect Ratio
◽
Periodic Structures
◽
Interference Lithography
◽
X Ray
Download Full-text
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