Controlled chemical mechanical polishing of polysilicon and silicon dioxide for single-electron device

2007 ◽  
Vol 25 (4) ◽  
pp. 1034-1037 ◽  
Author(s):  
Vishwanath Joshi ◽  
Alexei O. Orlov ◽  
Gregory L. Snider
2000 ◽  
Vol 47 (10) ◽  
pp. 1811-1818 ◽  
Author(s):  
A. Scholze ◽  
A. Schenk ◽  
W. Fichtner

2011 ◽  
Vol 84 (18) ◽  
Author(s):  
A. Bernand-Mantel ◽  
P. Seneor ◽  
K. Bouzehouane ◽  
S. Fusil ◽  
C. Deranlot ◽  
...  

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