Direct measurements and analyses of the Coulomb effects in electron projection lithography

2005 ◽  
Vol 23 (6) ◽  
pp. 3182 ◽  
Author(s):  
Jiro Yamamoto ◽  
Hiroshi Yamashita ◽  
Hiroshi Arimoto ◽  
Junji Ikeda ◽  
Shohei Suzuki ◽  
...  
Keyword(s):  
Projection Lithography ◽  
Direct Measurements ◽  
Coulomb Effects

Direct measurement of Coulomb effects in electron beam projection lithography

2001 ◽  
Vol 19 (6) ◽  
pp. 2468 ◽  
Author(s):  
Takehisa Yahiro ◽  
Shohei Suzuki ◽  
Takeshi Irita ◽  
Noriyuki Hirayanagi ◽  
Hiroyasu Shimizu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Measurement ◽  
Projection Lithography ◽  
Beam Projection ◽  
Coulomb Effects

Influence of Coulomb effects on electron projection lithography process

2004 ◽  
Vol 22 (6) ◽  
pp. 2891 ◽  
Author(s):  
Jiro Yamamoto ◽  
Hiroshi Yamashita ◽  
Masaki Yamabe ◽  
Hiroshi Arimoto
Keyword(s):  
Lithography Process ◽  
Projection Lithography ◽  
Coulomb Effects

Excimer Projection Lithography at 193-nm Wavelength

1988 ◽  
Author(s):  
M. Rothschild ◽  
D. J. Ehrlich
Keyword(s):  
Projection Lithography ◽  
193 Nm
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