Influence of Coulomb effects on electron projection lithography process

2004 ◽  
Vol 22 (6) ◽  
pp. 2891 ◽  
Author(s):  
Jiro Yamamoto ◽  
Hiroshi Yamashita ◽  
Masaki Yamabe ◽  
Hiroshi Arimoto
Keyword(s):  
Lithography Process ◽  
Projection Lithography ◽  
Coulomb Effects

Rapid biochemical functionalization of technical surfaces by means of a photobleaching-based maskless projection lithography process

2013 ◽  
Author(s):  
Ansgar Waldbaur ◽  
Björn Waterkotte ◽  
Juerg Leuthold ◽  
Katja Schmitz ◽  
Bastian E. Rapp
Keyword(s):  
Lithography Process ◽  
Projection Lithography

Ion projection lithography process on dry resist

1991 ◽  
Vol 55 (1-4) ◽  
pp. 902-904 ◽  
Author(s):  
A.I. Kholopkin ◽  
M.N. Lyakhov ◽  
D.A. Pankratenko ◽  
V.V. Simonov ◽  
A.F. Vyatkin
Keyword(s):  
Lithography Process ◽  
Projection Lithography ◽  
Ion Projection Lithography

Direct measurement of Coulomb effects in electron beam projection lithography

2001 ◽  
Vol 19 (6) ◽  
pp. 2468 ◽  
Author(s):  
Takehisa Yahiro ◽  
Shohei Suzuki ◽  
Takeshi Irita ◽  
Noriyuki Hirayanagi ◽  
Hiroyasu Shimizu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Direct Measurement ◽  
Projection Lithography ◽  
Beam Projection ◽  
Coulomb Effects

Direct measurements and analyses of the Coulomb effects in electron projection lithography

2005 ◽  
Vol 23 (6) ◽  
pp. 3182 ◽  
Author(s):  
Jiro Yamamoto ◽  
Hiroshi Yamashita ◽  
Hiroshi Arimoto ◽  
Junji Ikeda ◽  
Shohei Suzuki ◽  
...  
Keyword(s):  
Projection Lithography ◽  
Direct Measurements ◽  
Coulomb Effects

Excimer Projection Lithography at 193-nm Wavelength

1988 ◽  
Author(s):  
M. Rothschild ◽  
D. J. Ehrlich
Keyword(s):  
Projection Lithography ◽  
193 Nm

Salicidation process for submicrometre gate MOSFET fabrication using a resistless electron beam lithography process

1999 ◽  
Vol 35 (15) ◽  
pp. 1283 ◽  
Author(s):  
S. Michel ◽  
E. Lavallée ◽  
J. Beauvais ◽  
J. Mouine
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Lithography Process

Study of Alignment & Overlay Strategy in 14 nm Lithography Process

2020 ◽  
Author(s):  
Lulu Lai ◽  
Rui Qian ◽  
Biqiu Liu ◽  
Xiaobo Guo ◽  
Cong Zhang ◽  
...  
Keyword(s):  
Lithography Process
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