Thermal stability of trimethylsilylated mesoporous silica thin films as the ultralow-k dielectric for copper interconnects

2005 ◽  
Vol 23 (5) ◽  
pp. 2034 ◽  
Author(s):  
J. Y. Chen ◽  
F. M. Pan ◽  
L. Chang ◽  
A. T. Cho ◽  
K. J. Chao
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Mesoporous Silica ◽  
Copper Interconnects ◽  
Silica Thin Films ◽  
Thermal Stability Of

Thermal stability of molecularly functionalized mesoporous silica thin films

2007 ◽  
Vol 102 (4) ◽  
pp. 044507 ◽  
Author(s):  
A. P. Singh ◽  
D. D. Gandhi ◽  
R. Moore ◽  
G. Ramanath
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Mesoporous Silica ◽  
Functionalized Mesoporous Silica ◽  
Silica Thin Films ◽  
Thermal Stability Of

scholarly journals The role of the substrate on the mechanical and thermal stability of Pd thin films during hydrogen (de)sorption

2021 ◽  
Vol 46 (5) ◽  
pp. 4137-4153
Author(s):  
Neha Verma ◽  
Rob Delhez ◽  
Niek M. van der Pers ◽  
Frans D. Tichelaar ◽  
Amarante J. Böttger
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Thermal Stability Of

Photo-orientation of Mesoporous Silica Thin Films on Photocrosslinkable Polymer Films

2005 ◽  
Vol 17 (8) ◽  
pp. 1035-1039 ◽  
Author(s):  
H. Fukumoto ◽  
S. Nagano ◽  
N. Kawatsuki ◽  
T. Seki
Keyword(s):  
Thin Films ◽  
Mesoporous Silica ◽  
Polymer Films ◽  
Silica Thin Films

Effects of nitrogen ion implantation on the thermal stability of tungsten thin films

1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
Chang Woo Lee
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion ◽  
Thermal Stability Of
Sign in / Sign up

Export Citation Format

Share Document