Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference reactor

2005 ◽  
Vol 23 (6) ◽  
pp. 1657-1667 ◽  
Author(s):  
Baosuo Zhou ◽  
Eric A. Joseph ◽  
Sanket P. Sant ◽  
Yonghua Liu ◽  
Arun Radhakrishnan ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Surface Interactions ◽  
Plasma Surface ◽  
Inductively Coupled ◽  
Plasma Surface Interactions ◽  
Gaseous Electronics Conference ◽  
Effect Of Surface

Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas

2010 ◽  
Vol 82 (6) ◽  
pp. 1283-1299 ◽  
Author(s):  
Annemie Bogaerts ◽  
Christophe De Bie ◽  
Maxie Eckert ◽  
Violeta Georgieva ◽  
Tom Martens ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Barrier Discharge ◽  
Plasma Chemistry ◽  
Value Added ◽  
Md Simulations ◽  
Surface Interactions ◽  
Plasma Surface ◽  
Fluid Modeling ◽  
Inductively Coupled ◽  
Plasma Surface Interactions

In this paper, an overview is given of modeling activities going on in our research group, for describing the plasma chemistry and plasma–surface interactions in reactive plasmas. The plasma chemistry is calculated by a fluid approach or by hybrid Monte Carlo (MC)–fluid modeling. An example of both is illustrated in the first part of the paper. The example of fluid modeling is given for a dielectric barrier discharge (DBD) in CH4/O2, to describe the partial oxidation of CH4 into value-added chemicals. The example of hybrid MC–fluid modeling concerns an inductively coupled plasma (ICP) etch reactor in Ar/Cl2/O2, including also the description of the etch process. The second part of the paper deals with the treatment of plasma–surface interactions on the atomic level, with molecular dynamics (MD) simulations or a combination of MD and MC simulations.

Applying scattered-ion spectroscopy to the analyzing of plasma-surface interactions

2012 ◽  
Vol 76 (6) ◽  
pp. 683-686 ◽  
Author(s):  
N. V. Mamedov ◽  
V. A. Kurnaev ◽  
D. V. Ivanov ◽  
D. N. Sinel’nikov
Keyword(s):  
Surface Interactions ◽  
Plasma Surface ◽  
Ion Spectroscopy ◽  
Plasma Surface Interactions
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