Role of surface temperature in fluorocarbon plasma-surface interactions

2012 ◽  
Vol 30 (4) ◽  
pp. 041305 ◽  
Author(s):  
Caleb T. Nelson ◽  
Lawrence J. Overzet ◽  
Matthew J. Goeckner
Keyword(s):  
Surface Temperature ◽  
Surface Interactions ◽  
Plasma Surface ◽  
Plasma Surface Interactions ◽  
Fluorocarbon Plasma

On the role of plasma-surface interactions in dc magnetron discharges in Ar-N2gas mixtures

2001 ◽  
Vol 10 (1) ◽  
pp. 30-37 ◽  
Author(s):  
F Debal ◽  
J Bretagne ◽  
J P Dauchot ◽  
M Hecq ◽  
M Wautelet
Keyword(s):  
Surface Interactions ◽  
Plasma Surface ◽  
Plasma Surface Interactions

Applying scattered-ion spectroscopy to the analyzing of plasma-surface interactions

2012 ◽  
Vol 76 (6) ◽  
pp. 683-686 ◽  
Author(s):  
N. V. Mamedov ◽  
V. A. Kurnaev ◽  
D. V. Ivanov ◽  
D. N. Sinel’nikov
Keyword(s):  
Surface Interactions ◽  
Plasma Surface ◽  
Ion Spectroscopy ◽  
Plasma Surface Interactions
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