Effect of plasma‐surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge

1994 ◽  
Vol 76 (3) ◽  
pp. 1476-1479 ◽  
Author(s):  
B. N. Ganguly ◽  
P. Bletzinger
Keyword(s):  
Radio Frequency ◽  
Surface Interactions ◽  
Radial Variation ◽  
Atom Density ◽  
Plasma Surface ◽  
Plasma Surface Interactions ◽  
Radio Frequency Discharge

Applying scattered-ion spectroscopy to the analyzing of plasma-surface interactions

2012 ◽  
Vol 76 (6) ◽  
pp. 683-686 ◽  
Author(s):  
N. V. Mamedov ◽  
V. A. Kurnaev ◽  
D. V. Ivanov ◽  
D. N. Sinel’nikov
Keyword(s):  
Surface Interactions ◽  
Plasma Surface ◽  
Ion Spectroscopy ◽  
Plasma Surface Interactions
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