Epitaxial growth of NiSi[sub 2] on (001)Si inside nanoscale contact holes prepared by atomic force microscope tip-induced local oxidation of the thin Si[sub 3]N[sub 4] layer

2005 ◽  
Vol 23 (5) ◽  
pp. 1905 ◽  
Author(s):  
S. Y. Chen ◽  
L. J. Chen ◽  
S. D. Tzeng ◽  
S. Gwo
Keyword(s):  
Atomic Force Microscope ◽  
Epitaxial Growth ◽  
Atomic Force ◽  
Local Oxidation

Superconducting single photon detectors made by local oxidation with an atomic force microscope

2007 ◽  
Vol 90 (19) ◽  
pp. 191116 ◽  
Author(s):  
C. Delacour ◽  
J. Claudon ◽  
J.-Ph. Poizat ◽  
B. Pannetier ◽  
V. Bouchiat ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Single Photon ◽  
Photon Detectors ◽  
Atomic Force ◽  
Local Oxidation ◽  
Single Photon Detectors

Spm Based Lithography for Nanometer Scale Electrodes Fabrication

1999 ◽  
Vol 584 ◽  
Author(s):  
A. Notargiacomo ◽  
E. Giovine ◽  
E. Cianci ◽  
V. Foglietti ◽  
F. Evangelisti
Keyword(s):  
Atomic Force Microscope ◽  
Material Removal ◽  
Low Cost ◽  
Metal Electrode ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Quantum Devices ◽  
Positioning Accuracy ◽  
Atomic Force ◽  
Local Oxidation

AbstractScanning probe assisted nanolithography is a very attractive technique in terms of low-cost, patterning resolution and positioning accuracy. Our approach makes use of a commercial atomic force microscope and silicon probes to build simple nanostructures, such as metal electrode pairs, for application in novel quantum devices.Sub-100 nm patterning was successfully performed using three different techniques: direct material removal, scanning probe assisted mask patterning and local oxidation.

Photo-assisted local oxidation of GaN using an atomic force microscope

2006 ◽  
Vol 17 (13) ◽  
pp. 3299-3303 ◽  
Author(s):  
Jih Shang Hwang ◽  
Zhan Shuo Hu ◽  
Ton Yuan Lu ◽  
Li Wei Chen ◽  
Shi Wei Chen ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation

Local oxidation of InN and GaN using an atomic force microscope

2006 ◽  
Vol 17 (3) ◽  
pp. 859-863 ◽  
Author(s):  
Jih Shang Hwang ◽  
Zhan Shuo Hu ◽  
Zen Yu You ◽  
Tai Yuan Lin ◽  
Chin Lian Hsiao ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation

Measurement of Reaction Current during Atomic Force Microscope Local Oxidation of Conductive Surfaces Capped with Insulating Layers

2008 ◽  
Vol 47 (1) ◽  
pp. 768-770
Author(s):  
Yasuyuki Shimada ◽  
Tsutomu Yamada ◽  
Jun-ichi Shirakashi ◽  
Yasushi Takemura
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation ◽  
Conductive Surfaces

scholarly journals Atomic force microscope local oxidation nanolithography of graphene

2008 ◽  
Vol 93 (9) ◽  
pp. 093107 ◽  
Author(s):  
Lishan Weng ◽  
Liyuan Zhang ◽  
Yong P. Chen ◽  
L. P. Rokhinson
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation

Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication

1997 ◽  
Vol 71 (2) ◽  
pp. 285-287 ◽  
Author(s):  
Phaedon Avouris ◽  
Tobias Hertel ◽  
Richard Martel
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation
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